Nanopatterned Silicon Substrate Use in Heterojunction Thin Film Solar Cells Made by Magnetron Sputtering

Nanopatterned Silicon Substrate Use in Heterojunction Thin Film Solar Cells Made by Magnetron Sputtering

This paper describes a method for fabricating silicon heterojunction thin film solar cells with an ITO/p-type a-Si : H/n-type c-Si structure by radiofrequency magnetron sputtering. A short-circuit current density and efficiency of 28.80 mA/cm2 and 8.67% were achieved. Novel nanopatterned silicon waf...

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Bibliographic Details
Main Authors:	Shao-Ze Tseng, Chang-Rong Lin, Hung-Sen Wei, Chia-Hua Chan, Sheng-Hui Chen
Format:	Article
Language:	English
Published:	Wiley 2014-01-01
Series:	International Journal of Photoenergy
Online Access:	http://dx.doi.org/10.1155/2014/707543
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