A novel multiple directional shearing interferometry system with synchronous polarization phase shifting
Abstract This paper explores a multi-directional (multiple directional) shearing synchronous polarization phase-shifting interferometer that utilizes a birefringent crystal displacer. This design effectively mitigates nonlinear issues and environmental influences commonly encountered in synchronous...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-01-01
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| Series: | Scientific Reports |
| Subjects: | |
| Online Access: | https://doi.org/10.1038/s41598-025-86370-8 |
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| Summary: | Abstract This paper explores a multi-directional (multiple directional) shearing synchronous polarization phase-shifting interferometer that utilizes a birefringent crystal displacer. This design effectively mitigates nonlinear issues and environmental influences commonly encountered in synchronous phase-shifting interferometry. Additionally, it enables the acquisition of shear wavefront information from multiple directions. By solving for the coefficients of the measured wavefront using multi-directional differential wavefront data, the system performs coefficient fitting to reconstruct the wavefront. The characteristics of crystal birefringence beam modulation, phase grating diffraction, and the polarization phase-shifting array for synchronous phase-shifting interferometry are investigated, based on the specific implementation methods of multi-directional shearing and synchronous polarization phase-shifting. The preprocessing method for the multi-directional shearing phase-shifting interferogram is then presented, followed by a detailed explanation of the spatial position registration technique for the shearing interferogram and the calculation method for the shear amount. The interferometer’s construction system was experimentally tested using a spherical optical component, and the results were compared with those obtained from ZYGO to verify its accuracy and testing reliability. |
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| ISSN: | 2045-2322 |