Multiphysical model of CMUT array based on modal decomposition and the Rayleigh integral

There is a high number of modeling techniques for calculation of characteristics of capacitive micromachined ultrasound transducers. Very few of them are capable of calculation of the acoustic field, especially when the number of cells in the array is huge. Implementation of an approach based on sup...

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Bibliographic Details
Main Authors: A.E. Biriukov, A.M. Korsunsky
Format: Article
Language:English
Published: Elsevier 2025-06-01
Series:Sensing and Bio-Sensing Research
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2214180425000509
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