Geometrical Anatomy for Oxygen Vacancies in Epitaxial Hf0.5Zr0.5O2 Films Grown via Atomic Layer Deposition

Geometrical Anatomy for Oxygen Vacancies in Epitaxial Hf0.5Zr0.5O2 Films Grown via Atomic Layer Deposition

Abstract The selective influence of elastic strain on the formation of oxygen deficiencies in (001)‐, (110)‐, and (111)‐ epitaxial Hf0.5Zr0.5O2 films grown by using atomic layer deposition is reported. Optical spectroscopy, conducted using UV–vis spectroscopic ellipsometry on these Hf0.5Zr0.5O2 film...

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Bibliographic Details
Main Authors: Chihwan An, Jung Woo Cho, Tae Yoon Lee, Myeong Seop Song, Baekjune Kang, Hongju Kim, Jun Hee Lee, Changhee Sohn, Seung Chul Chae
Format: Article
Language:English
Published: Wiley-VCH 2025-04-01
Series:Advanced Materials Interfaces
Subjects:
atomic layer deposition
epitaxy
hafnium oxide
oxygen vacancies
strain engineering
Online Access:https://doi.org/10.1002/admi.202400742
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