APA (7th ed.) Citation

An, C., Cho, J. W., Lee, T. Y., Song, M. S., Kang, B., Kim, H., . . . Chae, S. C. Geometrical Anatomy for Oxygen Vacancies in Epitaxial Hf0.5Zr0.5O2 Films Grown via Atomic Layer Deposition. Wiley-VCH.

Chicago Style (17th ed.) Citation

An, Chihwan, Jung Woo Cho, Tae Yoon Lee, Myeong Seop Song, Baekjune Kang, Hongju Kim, Jun Hee Lee, Changhee Sohn, and Seung Chul Chae. Geometrical Anatomy for Oxygen Vacancies in Epitaxial Hf0.5Zr0.5O2 Films Grown via Atomic Layer Deposition. Wiley-VCH.

MLA (9th ed.) Citation

An, Chihwan, et al. Geometrical Anatomy for Oxygen Vacancies in Epitaxial Hf0.5Zr0.5O2 Films Grown via Atomic Layer Deposition. Wiley-VCH.