Formation and Device Application of Ge Nanowire Heterostructures via Rapid Thermal Annealing

We reviewed the formation of Ge nanowire heterostructure and its field-effect characteristics by a controlled reaction between a single-crystalline Ge nanowire and Ni contact pads using a facile rapid thermal annealing process. Scanning electron microscopy and transmission electron microscopy demons...

Full description

Saved in:
Bibliographic Details
Main Authors: Jianshi Tang, Chiu-Yen Wang, Faxian Xiu, Yi Zhou, Lih-Juann Chen, Kang L. Wang
Format: Article
Language:English
Published: Wiley 2011-01-01
Series:Advances in Materials Science and Engineering
Online Access:http://dx.doi.org/10.1155/2011/316513
Tags: Add Tag
No Tags, Be the first to tag this record!
_version_ 1832545583042134016
author Jianshi Tang
Chiu-Yen Wang
Faxian Xiu
Yi Zhou
Lih-Juann Chen
Kang L. Wang
author_facet Jianshi Tang
Chiu-Yen Wang
Faxian Xiu
Yi Zhou
Lih-Juann Chen
Kang L. Wang
author_sort Jianshi Tang
collection DOAJ
description We reviewed the formation of Ge nanowire heterostructure and its field-effect characteristics by a controlled reaction between a single-crystalline Ge nanowire and Ni contact pads using a facile rapid thermal annealing process. Scanning electron microscopy and transmission electron microscopy demonstrated a wide temperature range of 400~500°C to convert the Ge nanowire to a single-crystalline Ni2Ge/Ge/Ni2Ge nanowire heterostructure with atomically sharp interfaces. More importantly, we studied the effect of oxide confinement during the formation of nickel germanides in a Ge nanowire. In contrast to the formation of Ni2Ge/Ge/Ni2Ge nanowire heterostructures, a segment of high-quality epitaxial NiGe was formed between Ni2Ge with the confinement of Al2O3 during annealing. A twisted epitaxial growth mode was observed in both two Ge nanowire heterostructures to accommodate the large lattice mismatch in the NixGe/Ge interface. Moreover, we have demonstrated field-effect transistors using the nickel germanide regions as source/drain contacts to the Ge nanowire channel. Our Ge nanowire transistors have shown a high-performance p-type behavior with a high on/off ratio of 105 and a field-effect hole mobility of 210 cm2/Vs, which showed a significant improvement compared with that from unreacted Ge nanowire transistors.
format Article
id doaj-art-7bd8870237664c418c3c16b89f630f29
institution Kabale University
issn 1687-8434
1687-8442
language English
publishDate 2011-01-01
publisher Wiley
record_format Article
series Advances in Materials Science and Engineering
spelling doaj-art-7bd8870237664c418c3c16b89f630f292025-02-03T07:25:24ZengWileyAdvances in Materials Science and Engineering1687-84341687-84422011-01-01201110.1155/2011/316513316513Formation and Device Application of Ge Nanowire Heterostructures via Rapid Thermal AnnealingJianshi Tang0Chiu-Yen Wang1Faxian Xiu2Yi Zhou3Lih-Juann Chen4Kang L. Wang5Device Research Laboratory, Department of Electrical Engineering, University of California, Los Angeles, CA 90095, USADepartment of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, TaiwanDevice Research Laboratory, Department of Electrical Engineering, University of California, Los Angeles, CA 90095, USADevice Research Laboratory, Department of Electrical Engineering, University of California, Los Angeles, CA 90095, USADepartment of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, TaiwanDevice Research Laboratory, Department of Electrical Engineering, University of California, Los Angeles, CA 90095, USAWe reviewed the formation of Ge nanowire heterostructure and its field-effect characteristics by a controlled reaction between a single-crystalline Ge nanowire and Ni contact pads using a facile rapid thermal annealing process. Scanning electron microscopy and transmission electron microscopy demonstrated a wide temperature range of 400~500°C to convert the Ge nanowire to a single-crystalline Ni2Ge/Ge/Ni2Ge nanowire heterostructure with atomically sharp interfaces. More importantly, we studied the effect of oxide confinement during the formation of nickel germanides in a Ge nanowire. In contrast to the formation of Ni2Ge/Ge/Ni2Ge nanowire heterostructures, a segment of high-quality epitaxial NiGe was formed between Ni2Ge with the confinement of Al2O3 during annealing. A twisted epitaxial growth mode was observed in both two Ge nanowire heterostructures to accommodate the large lattice mismatch in the NixGe/Ge interface. Moreover, we have demonstrated field-effect transistors using the nickel germanide regions as source/drain contacts to the Ge nanowire channel. Our Ge nanowire transistors have shown a high-performance p-type behavior with a high on/off ratio of 105 and a field-effect hole mobility of 210 cm2/Vs, which showed a significant improvement compared with that from unreacted Ge nanowire transistors.http://dx.doi.org/10.1155/2011/316513
spellingShingle Jianshi Tang
Chiu-Yen Wang
Faxian Xiu
Yi Zhou
Lih-Juann Chen
Kang L. Wang
Formation and Device Application of Ge Nanowire Heterostructures via Rapid Thermal Annealing
Advances in Materials Science and Engineering
title Formation and Device Application of Ge Nanowire Heterostructures via Rapid Thermal Annealing
title_full Formation and Device Application of Ge Nanowire Heterostructures via Rapid Thermal Annealing
title_fullStr Formation and Device Application of Ge Nanowire Heterostructures via Rapid Thermal Annealing
title_full_unstemmed Formation and Device Application of Ge Nanowire Heterostructures via Rapid Thermal Annealing
title_short Formation and Device Application of Ge Nanowire Heterostructures via Rapid Thermal Annealing
title_sort formation and device application of ge nanowire heterostructures via rapid thermal annealing
url http://dx.doi.org/10.1155/2011/316513
work_keys_str_mv AT jianshitang formationanddeviceapplicationofgenanowireheterostructuresviarapidthermalannealing
AT chiuyenwang formationanddeviceapplicationofgenanowireheterostructuresviarapidthermalannealing
AT faxianxiu formationanddeviceapplicationofgenanowireheterostructuresviarapidthermalannealing
AT yizhou formationanddeviceapplicationofgenanowireheterostructuresviarapidthermalannealing
AT lihjuannchen formationanddeviceapplicationofgenanowireheterostructuresviarapidthermalannealing
AT kanglwang formationanddeviceapplicationofgenanowireheterostructuresviarapidthermalannealing