Direct observation of intra-grain defect formation during local solid-phase epitaxy

Abstract Despite relentless efforts to improve fabrication processes, the achievement of a defect-free polycrystalline film (poly-film) through solid-phase crystallization (SPC) remains challenging, as evidenced by structural analyses. Understanding the dynamics of intermediate processes, including...

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Bibliographic Details
Main Authors: Manabu Tezura, Takanori Asano, Riichiro Takaishi, Mitsuhiro Tomita, Masumi Saitoh, Hiroki Tanaka
Format: Article
Language:English
Published: Nature Portfolio 2025-07-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-025-10376-5
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