Direct observation of intra-grain defect formation during local solid-phase epitaxy
Abstract Despite relentless efforts to improve fabrication processes, the achievement of a defect-free polycrystalline film (poly-film) through solid-phase crystallization (SPC) remains challenging, as evidenced by structural analyses. Understanding the dynamics of intermediate processes, including...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-07-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-025-10376-5 |
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