Batch growth of wafer-scale nanocrystalline NbSe<sub>2</sub> film for surface-enhanced Raman spectroscopy

Noble metal-based surface-enhanced Raman spectroscopy (SERS) has emerged as an ultrasensitive technique capable of detecting single molecules through their unique vibrational signatures. However, achieving robust SERS nanomaterials that combine significant enhancement factors, scalable reproducibili...

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Bibliographic Details
Main Authors: Lin Huihui, Li Yiwen, Li Yuxin, Li Meng-Xuan, Wu Luyan, Chen Zhaolong, Li Jing
Format: Article
Language:English
Published: Science Press 2025-01-01
Series:National Science Open
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Online Access:https://www.sciengine.com/doi/10.1360/nso/20240043
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Summary:Noble metal-based surface-enhanced Raman spectroscopy (SERS) has emerged as an ultrasensitive technique capable of detecting single molecules through their unique vibrational signatures. However, achieving robust SERS nanomaterials that combine significant enhancement factors, scalable reproducibility, and superior chemical stability remains a significant challenge. We present an oxygen-free vapor deposition technique for wafer-scale fabrication of nanocrystalline NbSe<sub>2</sub> (NC-NbSe<sub>2</sub>) films on SiO<sub>2</sub>/Si substrates, which is compatible with batch production. The NC-NbSe<sub>2</sub> films exhibit remarkable chemical stability across both crystalline domains (average size <sc>~8.1 nm)</sc> and grain boundaries. This stability, combined with enhanced surface adsorption and a high density of states near the Fermi level, enables superior SERS performance. Rhodamine 6G detection demonstrates a sensitivity of <sc>1×10<sup>−10</sup> M,</sc> comparable to noble metal-based SERS substrates. Additionally, the NC-NbSe<sub>2</sub> film maintains stable SERS signals under harsh thermal and chemical conditions. This scalable approach enables the creation of uniform, reproducible SERS atomic thin film, advancing applications in microelectronics and sensing technologies.
ISSN:2097-1168