A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
It was shown the possibility of increasing the sensitivity of a gas sensor based on nanocrystalline SiC films by using a scheme of a two-component sensing element, one of which is an n-nc-SiC film with electronic conductivity, and the second is an p-nc-SiC film with hole conductivity. It is shown th...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2021-12-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | https://tkea.com.ua/index.php/journal/article/view/65 |
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