Research on the Improvement of Wear Resistance of Si<sub>3</sub>N<sub>4</sub> Substrate by Magnetron Sputtering Deposition of TiN Thin Films with Different Film Structures

Research on the Improvement of Wear Resistance of Si<sub>3</sub>N<sub>4</sub> Substrate by Magnetron Sputtering Deposition of TiN Thin Films with Different Film Structures

In order to solve the problem that the surface of silicon nitride ceramic bearings is susceptible to wear under extreme operating conditions，gradient，multilayer and monolayer TiN films were prepared on silicon nitride substrates using magnetron sputtering.Three nitrogen supply modes were implemented...

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Bibliographic Details
Main Author: WANG He, CHEN Sibo, YAN Guangyu, WU Yuhou, CHU Jianxiang, DAI Guangyuan
Format: Article
Language:zho
Published: Editorial Department of Materials Protection 2025-07-01
Series:Cailiao Baohu
Subjects:
magnetron sputtering method；si<sub>3</sub>n<sub>4</sub> substrate；tin film；film-substrate adhesion；tribological property
Online Access:http://www.mat-pro.com/fileup/1001-1560/PDF/20250708.pdf
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