WANG He, C. S. Research on the Improvement of Wear Resistance of Si<sub>3</sub>N<sub>4</sub> Substrate by Magnetron Sputtering Deposition of TiN Thin Films with Different Film Structures. Editorial Department of Materials Protection.
Chicago Style (17th ed.) CitationWANG He, CHEN Sibo. Research on the Improvement of Wear Resistance of Si<sub>3</sub>N<sub>4</sub> Substrate by Magnetron Sputtering Deposition of TiN Thin Films with Different Film Structures. Editorial Department of Materials Protection.
MLA (9th ed.) CitationWANG He, CHEN Sibo. Research on the Improvement of Wear Resistance of Si<sub>3</sub>N<sub>4</sub> Substrate by Magnetron Sputtering Deposition of TiN Thin Films with Different Film Structures. Editorial Department of Materials Protection.
Warning: These citations may not always be 100% accurate.