Sianko, S. F., & Zelenin, V. A. Control of local stress in semiconductor silicon structures. Belarusian National Technical University.
Chicago Style (17th ed.) CitationSianko, S. F., and V. A. Zelenin. Control of Local Stress in Semiconductor Silicon Structures. Belarusian National Technical University.
MLA (9th ed.) CitationSianko, S. F., and V. A. Zelenin. Control of Local Stress in Semiconductor Silicon Structures. Belarusian National Technical University.
Warning: These citations may not always be 100% accurate.