The Influence of Hydrogen on the Properties of Zinc Sulfide Thin Films Deposited by Magnetron Sputtering
Zinc sulfide thin films have been deposited with hydrogen in Ar and Ar+H2 atmosphere by radio frequency magnetron sputtering. The thickness, structural properties, composition, surface morphology, and optical and electrical properties of the films have been investigated. Effect of hydrogen on the pr...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2014-01-01
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| Series: | International Journal of Photoenergy |
| Online Access: | http://dx.doi.org/10.1155/2014/720560 |
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| _version_ | 1832549523339083776 |
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| author | Hang Xu Lili Wu Wenwu Wang Lixiang Zhang Jingquan Zhang Wei Li Lianghuan Feng |
| author_facet | Hang Xu Lili Wu Wenwu Wang Lixiang Zhang Jingquan Zhang Wei Li Lianghuan Feng |
| author_sort | Hang Xu |
| collection | DOAJ |
| description | Zinc sulfide thin films have been deposited with hydrogen in Ar and Ar+H2 atmosphere by radio frequency magnetron sputtering. The thickness, structural properties, composition, surface morphology, and optical and electrical properties of the films have been investigated. Effect of hydrogen on the properties of the film was studied. The results showed that hydrogen leads to better crystallinity and larger crystallite size of ZnS polycrystalline films. The band gaps of the films in Ar+H2 are about 3.48 eV compared with 3.24 eV without hydrogen. It is also demonstrated that hydrogen can result in a better stoichiometric composition of the films. |
| format | Article |
| id | doaj-art-7435f25d19f44e1bbb81ffdf446bd458 |
| institution | Kabale University |
| issn | 1110-662X 1687-529X |
| language | English |
| publishDate | 2014-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | International Journal of Photoenergy |
| spelling | doaj-art-7435f25d19f44e1bbb81ffdf446bd4582025-02-03T06:11:06ZengWileyInternational Journal of Photoenergy1110-662X1687-529X2014-01-01201410.1155/2014/720560720560The Influence of Hydrogen on the Properties of Zinc Sulfide Thin Films Deposited by Magnetron SputteringHang Xu0Lili Wu1Wenwu Wang2Lixiang Zhang3Jingquan Zhang4Wei Li5Lianghuan Feng6College of Materials Science and Engineering, Sichuan University, Chengdu 610064, ChinaCollege of Materials Science and Engineering, Sichuan University, Chengdu 610064, ChinaCollege of Materials Science and Engineering, Sichuan University, Chengdu 610064, ChinaCollege of Materials Science and Engineering, Sichuan University, Chengdu 610064, ChinaCollege of Materials Science and Engineering, Sichuan University, Chengdu 610064, ChinaCollege of Materials Science and Engineering, Sichuan University, Chengdu 610064, ChinaCollege of Materials Science and Engineering, Sichuan University, Chengdu 610064, ChinaZinc sulfide thin films have been deposited with hydrogen in Ar and Ar+H2 atmosphere by radio frequency magnetron sputtering. The thickness, structural properties, composition, surface morphology, and optical and electrical properties of the films have been investigated. Effect of hydrogen on the properties of the film was studied. The results showed that hydrogen leads to better crystallinity and larger crystallite size of ZnS polycrystalline films. The band gaps of the films in Ar+H2 are about 3.48 eV compared with 3.24 eV without hydrogen. It is also demonstrated that hydrogen can result in a better stoichiometric composition of the films.http://dx.doi.org/10.1155/2014/720560 |
| spellingShingle | Hang Xu Lili Wu Wenwu Wang Lixiang Zhang Jingquan Zhang Wei Li Lianghuan Feng The Influence of Hydrogen on the Properties of Zinc Sulfide Thin Films Deposited by Magnetron Sputtering International Journal of Photoenergy |
| title | The Influence of Hydrogen on the Properties of Zinc Sulfide Thin Films Deposited by Magnetron Sputtering |
| title_full | The Influence of Hydrogen on the Properties of Zinc Sulfide Thin Films Deposited by Magnetron Sputtering |
| title_fullStr | The Influence of Hydrogen on the Properties of Zinc Sulfide Thin Films Deposited by Magnetron Sputtering |
| title_full_unstemmed | The Influence of Hydrogen on the Properties of Zinc Sulfide Thin Films Deposited by Magnetron Sputtering |
| title_short | The Influence of Hydrogen on the Properties of Zinc Sulfide Thin Films Deposited by Magnetron Sputtering |
| title_sort | influence of hydrogen on the properties of zinc sulfide thin films deposited by magnetron sputtering |
| url | http://dx.doi.org/10.1155/2014/720560 |
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