Precursor sticking coefficient determination from indented deposits fabricated by electron beam induced deposition
A fast simulation approach for focused electron beam induced deposition (FEBID) numerically solves the diffusion–reaction equation (continuum model) of the precursor surface on the growing nanostructure in conjunction with a Monte Carlo simulation for electron transport in the growing deposit. An im...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Beilstein-Institut
2025-01-01
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| Series: | Beilstein Journal of Nanotechnology |
| Subjects: | |
| Online Access: | https://doi.org/10.3762/bjnano.16.4 |
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