Advanced Atomic Layer Modulation Based Highly Homogeneous PtRu Precious Metals Alloy Thin Films

Advanced Atomic Layer Modulation Based Highly Homogeneous PtRu Precious Metals Alloy Thin Films

Abstract Atomic layer modulation (ALM) presents a novel approach for controlling the stoichiometry of platinum‐ruthenium (PtRu) alloys rather than a tedious atomic layer deposition (ALD) supercycling multielement ALD process. This method sequentially pulses dimethyl‐(N,N‐dimethyl‐3‐butene‐1‐amine‐N)...

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Bibliographic Details
Main Authors: Yeseul Son, Sang Bok Kim, Debananda Mohapatra, Taehoon Cheon, Soo‐Hyun Kim
Format: Article
Language:English
Published: Wiley 2025-08-01
Series:Advanced Science
Subjects:
atomic layer deposition
atomic layer modulation
homogeneous composition
precious metals catalysis
PtRu atomic alloy
Online Access:https://doi.org/10.1002/advs.202503561
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