Improvement of Adhesion, Line Definition, Contact Resistance and Semiconductor Properties by Sputter-Etching

Improvement of Adhesion, Line Definition, Contact Resistance and Semiconductor Properties by Sputter-Etching

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Bibliographic Details
Main Author:	T. Kallfass
Format:	Article
Language:	English
Published:	Wiley 1979-01-01
Series:	Active and Passive Electronic Components
Online Access:	http://dx.doi.org/10.1155/APEC.5.215
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