Optomechanical Gyroscope Based on Micro-Hemispherical Shell and Optical Ring Resonators

Silicon photonic integrated circuits and micro-electro-mechanical systems enable the design of compact, high-performance micro-opto-electro-mechanical systems (MOEMS) gyroscopes, such as recently reported optomechanical gyroscopes. However, effective on-chip light coupling within a confined micro&am...

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Main Authors: Jamal N. A. Hassan, Wenyi Huang, Maoyuan Wang, Senyu Zhang, Guangjun Wen, Yongjun Huang
Format: Article
Language:English
Published: IEEE 2024-01-01
Series:IEEE Photonics Journal
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Online Access:https://ieeexplore.ieee.org/document/10607864/
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author Jamal N. A. Hassan
Wenyi Huang
Maoyuan Wang
Senyu Zhang
Guangjun Wen
Yongjun Huang
author_facet Jamal N. A. Hassan
Wenyi Huang
Maoyuan Wang
Senyu Zhang
Guangjun Wen
Yongjun Huang
author_sort Jamal N. A. Hassan
collection DOAJ
description Silicon photonic integrated circuits and micro-electro-mechanical systems enable the design of compact, high-performance micro-opto-electro-mechanical systems (MOEMS) gyroscopes, such as recently reported optomechanical gyroscopes. However, effective on-chip light coupling within a confined micro&#x002F;nano system under vacuum posed challenges for conventional angular velocity measurements in prior optomechanical gyroscopes. Additionally, A core challenge in resonant gyroscopes is directly measuring resonant frequency displacement, necessitating alternative angular velocity detection techniques. Alternatively, this work presents the design of a novel optomechanical gyroscope based on the micro-hemispherical shell resonator integrated with optical ring cavity resonators. This integrated optomechanical device combines the principles of shell resonators and optical ring cavity resonators to enhance gyroscope performance. The high-Q optical ring resonators coupled via evanescent fields from the on-chip silicon waveguide, serve as the basic building block. Overall, the gyroscope design utilizes principles of both mechanical resonators and integrated photonics to address challenges in on-chip light coupling and angular velocity detection for next-generation optomechanical inertial sensors. Numerical simulations demonstrated the optomechanical micro-hemispherical shell resonator gyroscope could attain a calculated scale factor of 77.9 mV&#x002F;(&#x00B0;&#x002F;s) and total angle random walk of 0.0662 &#x00B0;&#x002F;h<sup>1&#x002F;2</sup> for a micro-hemispherical shell mass of 212 ng at an input laser power of 5 mW. These performance metrics suggest the proposed integrated optomechanical gyroscope design holds promise for applications requiring chip-scale inertial navigation, attitude measurement, and stabilization.
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issn 1943-0655
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publishDate 2024-01-01
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spelling doaj-art-63e2f6dbfb604d4aaaa70be20f2fb0d42025-01-24T00:00:36ZengIEEEIEEE Photonics Journal1943-06552024-01-0116411710.1109/JPHOT.2024.343274410607864Optomechanical Gyroscope Based on Micro-Hemispherical Shell and Optical Ring ResonatorsJamal N. A. Hassan0https://orcid.org/0000-0001-9191-5174Wenyi Huang1Maoyuan Wang2https://orcid.org/0009-0006-7226-4592Senyu Zhang3Guangjun Wen4https://orcid.org/0000-0002-7246-669XYongjun Huang5https://orcid.org/0000-0002-5069-6451School of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu, ChinaSchool of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu, ChinaSchool of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu, ChinaSchool of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu, ChinaSchool of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu, ChinaSchool of Information and Communication Engineering, Sichuan Provincial Engineering Research Center of Communication Technology for Intelligent IoT, University of Electronic Science and Technology of China, Chengdu, ChinaSilicon photonic integrated circuits and micro-electro-mechanical systems enable the design of compact, high-performance micro-opto-electro-mechanical systems (MOEMS) gyroscopes, such as recently reported optomechanical gyroscopes. However, effective on-chip light coupling within a confined micro&#x002F;nano system under vacuum posed challenges for conventional angular velocity measurements in prior optomechanical gyroscopes. Additionally, A core challenge in resonant gyroscopes is directly measuring resonant frequency displacement, necessitating alternative angular velocity detection techniques. Alternatively, this work presents the design of a novel optomechanical gyroscope based on the micro-hemispherical shell resonator integrated with optical ring cavity resonators. This integrated optomechanical device combines the principles of shell resonators and optical ring cavity resonators to enhance gyroscope performance. The high-Q optical ring resonators coupled via evanescent fields from the on-chip silicon waveguide, serve as the basic building block. Overall, the gyroscope design utilizes principles of both mechanical resonators and integrated photonics to address challenges in on-chip light coupling and angular velocity detection for next-generation optomechanical inertial sensors. Numerical simulations demonstrated the optomechanical micro-hemispherical shell resonator gyroscope could attain a calculated scale factor of 77.9 mV&#x002F;(&#x00B0;&#x002F;s) and total angle random walk of 0.0662 &#x00B0;&#x002F;h<sup>1&#x002F;2</sup> for a micro-hemispherical shell mass of 212 ng at an input laser power of 5 mW. These performance metrics suggest the proposed integrated optomechanical gyroscope design holds promise for applications requiring chip-scale inertial navigation, attitude measurement, and stabilization.https://ieeexplore.ieee.org/document/10607864/Optomechanical gyroscopeoptical ring cavity resonatorphotonic integrated circuitsangular rate sensitive
spellingShingle Jamal N. A. Hassan
Wenyi Huang
Maoyuan Wang
Senyu Zhang
Guangjun Wen
Yongjun Huang
Optomechanical Gyroscope Based on Micro-Hemispherical Shell and Optical Ring Resonators
IEEE Photonics Journal
Optomechanical gyroscope
optical ring cavity resonator
photonic integrated circuits
angular rate sensitive
title Optomechanical Gyroscope Based on Micro-Hemispherical Shell and Optical Ring Resonators
title_full Optomechanical Gyroscope Based on Micro-Hemispherical Shell and Optical Ring Resonators
title_fullStr Optomechanical Gyroscope Based on Micro-Hemispherical Shell and Optical Ring Resonators
title_full_unstemmed Optomechanical Gyroscope Based on Micro-Hemispherical Shell and Optical Ring Resonators
title_short Optomechanical Gyroscope Based on Micro-Hemispherical Shell and Optical Ring Resonators
title_sort optomechanical gyroscope based on micro hemispherical shell and optical ring resonators
topic Optomechanical gyroscope
optical ring cavity resonator
photonic integrated circuits
angular rate sensitive
url https://ieeexplore.ieee.org/document/10607864/
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AT wenyihuang optomechanicalgyroscopebasedonmicrohemisphericalshellandopticalringresonators
AT maoyuanwang optomechanicalgyroscopebasedonmicrohemisphericalshellandopticalringresonators
AT senyuzhang optomechanicalgyroscopebasedonmicrohemisphericalshellandopticalringresonators
AT guangjunwen optomechanicalgyroscopebasedonmicrohemisphericalshellandopticalringresonators
AT yongjunhuang optomechanicalgyroscopebasedonmicrohemisphericalshellandopticalringresonators