Reductive Thermal ALD of Pd and Pd2Ge From a Novel Recyclable Palladium Chloride Adduct
Abstract In this work, a new ALD process for palladium metal thin films using dichlorobis(triethylphosphine)palladium(II) (PdCl2(PEt3)2) and 1,4‐bis(trimethylsilyl)‐1,4‐dihydropyrazine ((Me3Si)2DHP) as reactants, is developed. The metal precursor is chosen based on the known reactivity of metal hali...
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| Format: | Article |
| Language: | English |
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Wiley-VCH
2025-02-01
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| Series: | Advanced Materials Interfaces |
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| Online Access: | https://doi.org/10.1002/admi.202400579 |
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| author | Anton Vihervaara Timo Hatanpää Mikko‐Ilmari Selänne Kenichiro Mizohata Mikko Ritala |
| author_facet | Anton Vihervaara Timo Hatanpää Mikko‐Ilmari Selänne Kenichiro Mizohata Mikko Ritala |
| author_sort | Anton Vihervaara |
| collection | DOAJ |
| description | Abstract In this work, a new ALD process for palladium metal thin films using dichlorobis(triethylphosphine)palladium(II) (PdCl2(PEt3)2) and 1,4‐bis(trimethylsilyl)‐1,4‐dihydropyrazine ((Me3Si)2DHP) as reactants, is developed. The metal precursor is chosen based on the known reactivity of metal halides with the DHP‐type reducing agents. Metallic Pd films are deposited at temperatures of 140–180 °C with a growth rate of 0.3–0.4 Å cycle−1. Furthermore using 1,4‐bis(trimethylgermyl)‐1,4‐dihydropyrazine ((Me3Ge)2DHP) as the co‐reactant yielded Pd2Ge thin films. Finally, full recyclability of the PdCl2(PEt3)2 is observed: unused molecules condensed in the exhaust tube can be collected by dissolving them into acetone, purified by recrystallization, and reused. |
| format | Article |
| id | doaj-art-63b4454be93141bf8acaccc802b9aede |
| institution | Kabale University |
| issn | 2196-7350 |
| language | English |
| publishDate | 2025-02-01 |
| publisher | Wiley-VCH |
| record_format | Article |
| series | Advanced Materials Interfaces |
| spelling | doaj-art-63b4454be93141bf8acaccc802b9aede2025-02-03T13:24:05ZengWiley-VCHAdvanced Materials Interfaces2196-73502025-02-01123n/an/a10.1002/admi.202400579Reductive Thermal ALD of Pd and Pd2Ge From a Novel Recyclable Palladium Chloride AdductAnton Vihervaara0Timo Hatanpää1Mikko‐Ilmari Selänne2Kenichiro Mizohata3Mikko Ritala4Department of Chemistry University of Helsinki P.O. Box 55 Helsinki FI‐00014 FinlandDepartment of Chemistry University of Helsinki P.O. Box 55 Helsinki FI‐00014 FinlandDepartment of Chemistry University of Helsinki P.O. Box 55 Helsinki FI‐00014 FinlandDepartment of Physics University of Helsinki P.O. Box 43 Helsinki FI‐00014 FinlandDepartment of Chemistry University of Helsinki P.O. Box 55 Helsinki FI‐00014 FinlandAbstract In this work, a new ALD process for palladium metal thin films using dichlorobis(triethylphosphine)palladium(II) (PdCl2(PEt3)2) and 1,4‐bis(trimethylsilyl)‐1,4‐dihydropyrazine ((Me3Si)2DHP) as reactants, is developed. The metal precursor is chosen based on the known reactivity of metal halides with the DHP‐type reducing agents. Metallic Pd films are deposited at temperatures of 140–180 °C with a growth rate of 0.3–0.4 Å cycle−1. Furthermore using 1,4‐bis(trimethylgermyl)‐1,4‐dihydropyrazine ((Me3Ge)2DHP) as the co‐reactant yielded Pd2Ge thin films. Finally, full recyclability of the PdCl2(PEt3)2 is observed: unused molecules condensed in the exhaust tube can be collected by dissolving them into acetone, purified by recrystallization, and reused.https://doi.org/10.1002/admi.202400579atomic layer depositionpalladium halide adductspalladium thin filmsreducing agent |
| spellingShingle | Anton Vihervaara Timo Hatanpää Mikko‐Ilmari Selänne Kenichiro Mizohata Mikko Ritala Reductive Thermal ALD of Pd and Pd2Ge From a Novel Recyclable Palladium Chloride Adduct Advanced Materials Interfaces atomic layer deposition palladium halide adducts palladium thin films reducing agent |
| title | Reductive Thermal ALD of Pd and Pd2Ge From a Novel Recyclable Palladium Chloride Adduct |
| title_full | Reductive Thermal ALD of Pd and Pd2Ge From a Novel Recyclable Palladium Chloride Adduct |
| title_fullStr | Reductive Thermal ALD of Pd and Pd2Ge From a Novel Recyclable Palladium Chloride Adduct |
| title_full_unstemmed | Reductive Thermal ALD of Pd and Pd2Ge From a Novel Recyclable Palladium Chloride Adduct |
| title_short | Reductive Thermal ALD of Pd and Pd2Ge From a Novel Recyclable Palladium Chloride Adduct |
| title_sort | reductive thermal ald of pd and pd2ge from a novel recyclable palladium chloride adduct |
| topic | atomic layer deposition palladium halide adducts palladium thin films reducing agent |
| url | https://doi.org/10.1002/admi.202400579 |
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