Application of Cad Systems to Accounting for Mechanical Stresses in the Development of Uncooled Thermal Detectors of the Bolometric Type
A comparative analysis of the characteristics of the main types of bolometers is indicated in the article. The constructive solution of an uncooled thermal detector of the bolometric type, formed using the technology of microelectromechanical systems, is studied. By means of computer simulation in m...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | Russian |
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Ministry of Education of the Republic of Belarus, Establishment The Main Information and Analytical Center
2023-03-01
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| Series: | Цифровая трансформация |
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| Online Access: | https://dt.bsuir.by/jour/article/view/743 |
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| author | Tran Van Trieu I. Yu. Lovshenko V. R. Stempitsky K. V. Korsak Tran Tuan Trung Dao Dinh Ha V. V. Kolos |
| author_facet | Tran Van Trieu I. Yu. Lovshenko V. R. Stempitsky K. V. Korsak Tran Tuan Trung Dao Dinh Ha V. V. Kolos |
| author_sort | Tran Van Trieu |
| collection | DOAJ |
| description | A comparative analysis of the characteristics of the main types of bolometers is indicated in the article. The constructive solution of an uncooled thermal detector of the bolometric type, formed using the technology of microelectromechanical systems, is studied. By means of computer simulation in modern computer-aided design systems in microelectronics, a static mechanical analysis was performed to assess the effect of mechanical stresses arising in structural materials during their formation on the magnitude of deformation. It has been established that to ensure the normal functioning of the microbolometer (to reduce the maximum deviation value of the film from the nominal value), it is necessary to reduce the internal mechanical stresses in the NiCr film. For the Si3N4 films, on the contrary, this value should be increased. |
| format | Article |
| id | doaj-art-6032fb1b2d2c4837b9e586875d8696dd |
| institution | Kabale University |
| issn | 2522-9613 2524-2822 |
| language | Russian |
| publishDate | 2023-03-01 |
| publisher | Ministry of Education of the Republic of Belarus, Establishment The Main Information and Analytical Center |
| record_format | Article |
| series | Цифровая трансформация |
| spelling | doaj-art-6032fb1b2d2c4837b9e586875d8696dd2025-02-03T00:56:57ZrusMinistry of Education of the Republic of Belarus, Establishment The Main Information and Analytical CenterЦифровая трансформация2522-96132524-28222023-03-01291728010.35596/1729-7648-2023-29-1-72-80298Application of Cad Systems to Accounting for Mechanical Stresses in the Development of Uncooled Thermal Detectors of the Bolometric TypeTran Van Trieu0I. Yu. Lovshenko1V. R. Stempitsky2K. V. Korsak3Tran Tuan Trung4Dao Dinh Ha5V. V. Kolos6Belarusian State University of Informatics and RadioelectronicsBelarusian State University of Informatics and RadioelectronicsBelarusian State University of Informatics and RadioelectronicsBelarusian State University of Informatics and RadioelectronicsLe Quy Don University of Science and TechnologyLe Quy Don University of Science and TechnologyJointStock Company “INTEGRAL”– Manager Holding Company “INTEGRAL”A comparative analysis of the characteristics of the main types of bolometers is indicated in the article. The constructive solution of an uncooled thermal detector of the bolometric type, formed using the technology of microelectromechanical systems, is studied. By means of computer simulation in modern computer-aided design systems in microelectronics, a static mechanical analysis was performed to assess the effect of mechanical stresses arising in structural materials during their formation on the magnitude of deformation. It has been established that to ensure the normal functioning of the microbolometer (to reduce the maximum deviation value of the film from the nominal value), it is necessary to reduce the internal mechanical stresses in the NiCr film. For the Si3N4 films, on the contrary, this value should be increased.https://dt.bsuir.by/jour/article/view/743integral uncooled thermal detectormicrobolometermodelingmechanical stressesdeformation |
| spellingShingle | Tran Van Trieu I. Yu. Lovshenko V. R. Stempitsky K. V. Korsak Tran Tuan Trung Dao Dinh Ha V. V. Kolos Application of Cad Systems to Accounting for Mechanical Stresses in the Development of Uncooled Thermal Detectors of the Bolometric Type Цифровая трансформация integral uncooled thermal detector microbolometer modeling mechanical stresses deformation |
| title | Application of Cad Systems to Accounting for Mechanical Stresses in the Development of Uncooled Thermal Detectors of the Bolometric Type |
| title_full | Application of Cad Systems to Accounting for Mechanical Stresses in the Development of Uncooled Thermal Detectors of the Bolometric Type |
| title_fullStr | Application of Cad Systems to Accounting for Mechanical Stresses in the Development of Uncooled Thermal Detectors of the Bolometric Type |
| title_full_unstemmed | Application of Cad Systems to Accounting for Mechanical Stresses in the Development of Uncooled Thermal Detectors of the Bolometric Type |
| title_short | Application of Cad Systems to Accounting for Mechanical Stresses in the Development of Uncooled Thermal Detectors of the Bolometric Type |
| title_sort | application of cad systems to accounting for mechanical stresses in the development of uncooled thermal detectors of the bolometric type |
| topic | integral uncooled thermal detector microbolometer modeling mechanical stresses deformation |
| url | https://dt.bsuir.by/jour/article/view/743 |
| work_keys_str_mv | AT tranvantrieu applicationofcadsystemstoaccountingformechanicalstressesinthedevelopmentofuncooledthermaldetectorsofthebolometrictype AT iyulovshenko applicationofcadsystemstoaccountingformechanicalstressesinthedevelopmentofuncooledthermaldetectorsofthebolometrictype AT vrstempitsky applicationofcadsystemstoaccountingformechanicalstressesinthedevelopmentofuncooledthermaldetectorsofthebolometrictype AT kvkorsak applicationofcadsystemstoaccountingformechanicalstressesinthedevelopmentofuncooledthermaldetectorsofthebolometrictype AT trantuantrung applicationofcadsystemstoaccountingformechanicalstressesinthedevelopmentofuncooledthermaldetectorsofthebolometrictype AT daodinhha applicationofcadsystemstoaccountingformechanicalstressesinthedevelopmentofuncooledthermaldetectorsofthebolometrictype AT vvkolos applicationofcadsystemstoaccountingformechanicalstressesinthedevelopmentofuncooledthermaldetectorsofthebolometrictype |