Reduction of absorption of Ta2O5 monolayers through the suppression of structural defects by employing an appropriate ionic oxygen concentration
Abstract Ultralow-absorption laser films have critical applications in high-power continuous-laser and gravitational-wave-detection systems. During film deposition, the ionic oxygen concentration significantly affects the absorption loss of the film. In this study, Ta2O5 monolayers were deposited us...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-02-01
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| Series: | Scientific Reports |
| Subjects: | |
| Online Access: | https://doi.org/10.1038/s41598-025-86151-3 |
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