Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas
This paper presents a fully inkjet-printed flexible MEMS switch for phased-array antennas. The physical structure of the printed MEMS switch consists of an anchor with a clamp-clamp beam, a sacrificial layer, and bottom transmission lines. 5-mil Kapton® polyimide film is used as a flexible substrate...
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| Format: | Article |
| Language: | English |
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Wiley
2018-01-01
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| Series: | International Journal of Antennas and Propagation |
| Online Access: | http://dx.doi.org/10.1155/2018/4517848 |
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| author | Mahmuda Akter Monne Xing Lan Chunbo Zhang Maggie Yihong Chen |
| author_facet | Mahmuda Akter Monne Xing Lan Chunbo Zhang Maggie Yihong Chen |
| author_sort | Mahmuda Akter Monne |
| collection | DOAJ |
| description | This paper presents a fully inkjet-printed flexible MEMS switch for phased-array antennas. The physical structure of the printed MEMS switch consists of an anchor with a clamp-clamp beam, a sacrificial layer, and bottom transmission lines. 5-mil Kapton® polyimide film is used as a flexible substrate material. Two different types of conductive ink PEDOT : PSS from Sigma Aldrich and silver nanoparticle ink from NovaCentrix are used for the fabrication of different printed layers. Layer-by-layer fabrication process and material evaluation are illustrated. Layer characterization is done with respect to critical thickness and resistance using 2D/3D material analysis. Fujifilm Dimatix Material Printer (DMP-2800) is used for fabrication, and KLA-Tencor (P-7) profiler is used for 2D and 3D analysis of each layer. The MEMS switch has a low actuation voltage of 1.2 V, current capacity of 0.2195 mA, a current on-off ratio of 2195 : 1, and an RF insertion loss of 5 dB up to 13.5 GHz. Printed MEMS switch technology is a promising candidate for flexible and reconfigurable phased-array antennas and other radio frequency (RF) and microwave frequency applications. |
| format | Article |
| id | doaj-art-5e02378adc1b443eb308df2e6d1e2cde |
| institution | Kabale University |
| issn | 1687-5869 1687-5877 |
| language | English |
| publishDate | 2018-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | International Journal of Antennas and Propagation |
| spelling | doaj-art-5e02378adc1b443eb308df2e6d1e2cde2025-02-03T01:00:27ZengWileyInternational Journal of Antennas and Propagation1687-58691687-58772018-01-01201810.1155/2018/45178484517848Inkjet-Printed Flexible MEMS Switches for Phased-Array AntennasMahmuda Akter Monne0Xing Lan1Chunbo Zhang2Maggie Yihong Chen3Ingram School of Engineering, Texas State University, San Marcos, TX 78666, USAOne Space Park, Northrop Grumman, Redondo Beach, CA 90278, USAOne Space Park, Northrop Grumman, Redondo Beach, CA 90278, USAIngram School of Engineering, Texas State University, San Marcos, TX 78666, USAThis paper presents a fully inkjet-printed flexible MEMS switch for phased-array antennas. The physical structure of the printed MEMS switch consists of an anchor with a clamp-clamp beam, a sacrificial layer, and bottom transmission lines. 5-mil Kapton® polyimide film is used as a flexible substrate material. Two different types of conductive ink PEDOT : PSS from Sigma Aldrich and silver nanoparticle ink from NovaCentrix are used for the fabrication of different printed layers. Layer-by-layer fabrication process and material evaluation are illustrated. Layer characterization is done with respect to critical thickness and resistance using 2D/3D material analysis. Fujifilm Dimatix Material Printer (DMP-2800) is used for fabrication, and KLA-Tencor (P-7) profiler is used for 2D and 3D analysis of each layer. The MEMS switch has a low actuation voltage of 1.2 V, current capacity of 0.2195 mA, a current on-off ratio of 2195 : 1, and an RF insertion loss of 5 dB up to 13.5 GHz. Printed MEMS switch technology is a promising candidate for flexible and reconfigurable phased-array antennas and other radio frequency (RF) and microwave frequency applications.http://dx.doi.org/10.1155/2018/4517848 |
| spellingShingle | Mahmuda Akter Monne Xing Lan Chunbo Zhang Maggie Yihong Chen Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas International Journal of Antennas and Propagation |
| title | Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas |
| title_full | Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas |
| title_fullStr | Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas |
| title_full_unstemmed | Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas |
| title_short | Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas |
| title_sort | inkjet printed flexible mems switches for phased array antennas |
| url | http://dx.doi.org/10.1155/2018/4517848 |
| work_keys_str_mv | AT mahmudaaktermonne inkjetprintedflexiblememsswitchesforphasedarrayantennas AT xinglan inkjetprintedflexiblememsswitchesforphasedarrayantennas AT chunbozhang inkjetprintedflexiblememsswitchesforphasedarrayantennas AT maggieyihongchen inkjetprintedflexiblememsswitchesforphasedarrayantennas |