The Impact of Laser Irradiation on Thin ZrN Films Deposited by Pulsed DC Magnetron Sputtering

The Impact of Laser Irradiation on Thin ZrN Films Deposited by Pulsed DC Magnetron Sputtering

Transition metal nitrides have extensive applications, including magnetic storage devices, hardware resistance coatings, and low-temperature fuel cells. This study investigated the structural, electrical, and mechanical properties of thin zirconium nitride (ZrN) films by examining the effects of las...

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Bibliographic Details
Main Authors: Ameena Nazneen, Penghui Lei, Di Yun
Format: Article
Language:English
Published: MDPI AG 2024-12-01
Series:Nanomaterials
Subjects:
zirconium nitride
sputtering
voids
thin film
laser
Online Access:https://www.mdpi.com/2079-4991/14/24/1999
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