Device Modeling Based on Cost-Sensitive Densely Connected Deep Neural Networks

Engineers used TCAD tools for semiconductor devices modeling. However, it is computationally expensive and time-consuming for advanced devices with smaller dimensions. Therefore, this work proposes a machine learning-based device modeling algorithm to capture the complex nonlinear relationship betwe...

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Main Authors: Xiaoying Tang, Zhiqiang Li, Lang Zeng, Hongwei Zhou, Xiaoxu Cheng, Zhenjie Yao
Format: Article
Language:English
Published: IEEE 2024-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/10643157/
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_version_ 1832583225686360064
author Xiaoying Tang
Zhiqiang Li
Lang Zeng
Hongwei Zhou
Xiaoxu Cheng
Zhenjie Yao
author_facet Xiaoying Tang
Zhiqiang Li
Lang Zeng
Hongwei Zhou
Xiaoxu Cheng
Zhenjie Yao
author_sort Xiaoying Tang
collection DOAJ
description Engineers used TCAD tools for semiconductor devices modeling. However, it is computationally expensive and time-consuming for advanced devices with smaller dimensions. Therefore, this work proposes a machine learning-based device modeling algorithm to capture the complex nonlinear relationship between parameters and electrical characteristics of gate-all-around (GAA) nanowire field-effect transistors (NWFETs) from technology computer-aided design (TCAD) simulation results. This method utilizes a densely connected deep neural networks (DenseDNN), which establishes direct connections between layers in the neural networks, provides stronger feature extraction and information transmission capabilities. By incorporating cost-sensitive learning methods, the proposed model focus more on the critical data that determines device characteristics, leading to accurate prediction of key device characteristics under various parameters. Experimental results on a test dataset of 116 NWFETs demonstrate the effectiveness of this method. The DenseDNN model with cost-sensitive learning exhibits better performance than traditional deep neural networks (DNN) with various widths and depths, with a prediction error below 1.62%. Moreover, compared to TCAD simulation results, the model can speedup <inline-formula> <tex-math notation="LaTeX">$10^{6}\times$ </tex-math></inline-formula>.
format Article
id doaj-art-5a2f7eb3ea094365a5331344dcf613b0
institution Kabale University
issn 2168-6734
language English
publishDate 2024-01-01
publisher IEEE
record_format Article
series IEEE Journal of the Electron Devices Society
spelling doaj-art-5a2f7eb3ea094365a5331344dcf613b02025-01-29T00:00:18ZengIEEEIEEE Journal of the Electron Devices Society2168-67342024-01-011261962610.1109/JEDS.2024.344703210643157Device Modeling Based on Cost-Sensitive Densely Connected Deep Neural NetworksXiaoying Tang0https://orcid.org/0009-0002-4353-016XZhiqiang Li1https://orcid.org/0009-0003-7463-8576Lang Zeng2https://orcid.org/0000-0003-3157-1087Hongwei Zhou3https://orcid.org/0009-0000-7616-6726Xiaoxu Cheng4Zhenjie Yao5https://orcid.org/0000-0003-1027-637XKey Laboratory of Fabrication Technologies for Integrated Circuits, Chinese Academy of Sciences, Beijing, ChinaKey Laboratory of Fabrication Technologies for Integrated Circuits, Chinese Academy of Sciences, Beijing, ChinaMIIT Key Laboratory of Spintronics, School of Integrated Circuit Science and Engineering, Fert Beijing Institute, Beihang University, Beijing, ChinaMIIT Key Laboratory of Spintronics, School of Integrated Circuit Science and Engineering, Fert Beijing Institute, Beihang University, Beijing, ChinaPrimarius Technologies Company Ltd., Shanghai, ChinaKey Laboratory of Fabrication Technologies for Integrated Circuits, Chinese Academy of Sciences, Beijing, ChinaEngineers used TCAD tools for semiconductor devices modeling. However, it is computationally expensive and time-consuming for advanced devices with smaller dimensions. Therefore, this work proposes a machine learning-based device modeling algorithm to capture the complex nonlinear relationship between parameters and electrical characteristics of gate-all-around (GAA) nanowire field-effect transistors (NWFETs) from technology computer-aided design (TCAD) simulation results. This method utilizes a densely connected deep neural networks (DenseDNN), which establishes direct connections between layers in the neural networks, provides stronger feature extraction and information transmission capabilities. By incorporating cost-sensitive learning methods, the proposed model focus more on the critical data that determines device characteristics, leading to accurate prediction of key device characteristics under various parameters. Experimental results on a test dataset of 116 NWFETs demonstrate the effectiveness of this method. The DenseDNN model with cost-sensitive learning exhibits better performance than traditional deep neural networks (DNN) with various widths and depths, with a prediction error below 1.62%. Moreover, compared to TCAD simulation results, the model can speedup <inline-formula> <tex-math notation="LaTeX">$10^{6}\times$ </tex-math></inline-formula>.https://ieeexplore.ieee.org/document/10643157/Machine learningdevice modelingtechnology computer-aided design (TCAD) simulationcost-sensitive densely connected DNN
spellingShingle Xiaoying Tang
Zhiqiang Li
Lang Zeng
Hongwei Zhou
Xiaoxu Cheng
Zhenjie Yao
Device Modeling Based on Cost-Sensitive Densely Connected Deep Neural Networks
IEEE Journal of the Electron Devices Society
Machine learning
device modeling
technology computer-aided design (TCAD) simulation
cost-sensitive densely connected DNN
title Device Modeling Based on Cost-Sensitive Densely Connected Deep Neural Networks
title_full Device Modeling Based on Cost-Sensitive Densely Connected Deep Neural Networks
title_fullStr Device Modeling Based on Cost-Sensitive Densely Connected Deep Neural Networks
title_full_unstemmed Device Modeling Based on Cost-Sensitive Densely Connected Deep Neural Networks
title_short Device Modeling Based on Cost-Sensitive Densely Connected Deep Neural Networks
title_sort device modeling based on cost sensitive densely connected deep neural networks
topic Machine learning
device modeling
technology computer-aided design (TCAD) simulation
cost-sensitive densely connected DNN
url https://ieeexplore.ieee.org/document/10643157/
work_keys_str_mv AT xiaoyingtang devicemodelingbasedoncostsensitivedenselyconnecteddeepneuralnetworks
AT zhiqiangli devicemodelingbasedoncostsensitivedenselyconnecteddeepneuralnetworks
AT langzeng devicemodelingbasedoncostsensitivedenselyconnecteddeepneuralnetworks
AT hongweizhou devicemodelingbasedoncostsensitivedenselyconnecteddeepneuralnetworks
AT xiaoxucheng devicemodelingbasedoncostsensitivedenselyconnecteddeepneuralnetworks
AT zhenjieyao devicemodelingbasedoncostsensitivedenselyconnecteddeepneuralnetworks