Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate
Surface acoustic wave device with c-axis-oriented aluminum nitride (AlN) piezoelectric thin films on polymer substrates can be potentially used for development of flexible sensors, flexible microfluidic applications, microsystems, and lab-on-chip systems. In this work, the AlN films have been succes...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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Wiley
2012-01-01
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| Series: | Journal of Control Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2012/610160 |
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| _version_ | 1832558797687619584 |
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| author | Jian Zhou Shurong Dong Hao Jin Bing Feng Demiao Wang |
| author_facet | Jian Zhou Shurong Dong Hao Jin Bing Feng Demiao Wang |
| author_sort | Jian Zhou |
| collection | DOAJ |
| description | Surface acoustic wave device with c-axis-oriented aluminum nitride (AlN) piezoelectric thin films on polymer substrates can be potentially used for development of flexible sensors, flexible microfluidic applications, microsystems, and lab-on-chip systems. In this work, the AlN films have been successfully deposited on polymer substrates using the DC reactive magnetron-sputtering method at room temperature, and the XRD, SEM, and AFM methods reveal that low deposition pressure is beneficial to the highly c-axis-oriented AlN film on polymer substrates. Studies toward the development of AlN thin film-based flexible surface acoustic wave devices on the polymer substrates are initiated and the experimental and simulated results demonstrate the devices showing the acoustic wave velocity of 9000–10000 m/s, which indicate the AlN lamb wave. |
| format | Article |
| id | doaj-art-59b6334b606f4bbd9810bb00a7875617 |
| institution | Kabale University |
| issn | 1687-5249 1687-5257 |
| language | English |
| publishDate | 2012-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Journal of Control Science and Engineering |
| spelling | doaj-art-59b6334b606f4bbd9810bb00a78756172025-02-03T01:31:31ZengWileyJournal of Control Science and Engineering1687-52491687-52572012-01-01201210.1155/2012/610160610160Flexible Surface Acoustic Wave Device with AlN Film on Polymer SubstrateJian Zhou0Shurong Dong1Hao Jin2Bing Feng3Demiao Wang4Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaDepartment of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaDepartment of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaDepartment of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaDepartment of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, ChinaSurface acoustic wave device with c-axis-oriented aluminum nitride (AlN) piezoelectric thin films on polymer substrates can be potentially used for development of flexible sensors, flexible microfluidic applications, microsystems, and lab-on-chip systems. In this work, the AlN films have been successfully deposited on polymer substrates using the DC reactive magnetron-sputtering method at room temperature, and the XRD, SEM, and AFM methods reveal that low deposition pressure is beneficial to the highly c-axis-oriented AlN film on polymer substrates. Studies toward the development of AlN thin film-based flexible surface acoustic wave devices on the polymer substrates are initiated and the experimental and simulated results demonstrate the devices showing the acoustic wave velocity of 9000–10000 m/s, which indicate the AlN lamb wave.http://dx.doi.org/10.1155/2012/610160 |
| spellingShingle | Jian Zhou Shurong Dong Hao Jin Bing Feng Demiao Wang Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate Journal of Control Science and Engineering |
| title | Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate |
| title_full | Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate |
| title_fullStr | Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate |
| title_full_unstemmed | Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate |
| title_short | Flexible Surface Acoustic Wave Device with AlN Film on Polymer Substrate |
| title_sort | flexible surface acoustic wave device with aln film on polymer substrate |
| url | http://dx.doi.org/10.1155/2012/610160 |
| work_keys_str_mv | AT jianzhou flexiblesurfaceacousticwavedevicewithalnfilmonpolymersubstrate AT shurongdong flexiblesurfaceacousticwavedevicewithalnfilmonpolymersubstrate AT haojin flexiblesurfaceacousticwavedevicewithalnfilmonpolymersubstrate AT bingfeng flexiblesurfaceacousticwavedevicewithalnfilmonpolymersubstrate AT demiaowang flexiblesurfaceacousticwavedevicewithalnfilmonpolymersubstrate |