Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage

Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage

Iterative learning control (ILC) is one of the most popular tracking control methods for systems that repeatedly execute the same task. A system model is usually used in the analysis and design of ILC. Model-based ILC results in general in fast convergence and good performance. However, the model un...

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Bibliographic Details
Main Authors: Fazhi Song, Yang Liu, Jun Cao, Li Li, Jiubin Tan
Format: Article
Language:English
Published: Wiley 2018-01-01
Series:Complexity
Online Access:http://dx.doi.org/10.1155/2018/5406035
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