APA (7th ed.) Citation

Song, F., Liu, Y., Cao, J., Li, L., & Tan, J. Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage. Wiley.

Chicago Style (17th ed.) Citation

Song, Fazhi, Yang Liu, Jun Cao, Li Li, and Jiubin Tan. Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage. Wiley.

MLA (9th ed.) Citation

Song, Fazhi, et al. Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage. Wiley.

Warning: These citations may not always be 100% accurate.