Song, F., Liu, Y., Cao, J., Li, L., & Tan, J. Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage. Wiley.
Chicago Style (17th ed.) CitationSong, Fazhi, Yang Liu, Jun Cao, Li Li, and Jiubin Tan. Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage. Wiley.
MLA (9th ed.) CitationSong, Fazhi, et al. Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage. Wiley.
Warning: These citations may not always be 100% accurate.