Characterization of WO3 Thin Films Grown on Silicon by HFMOD

Characterization of WO3 Thin Films Grown on Silicon by HFMOD

We studied the effect of annealing temperature on the physical properties of WO3 thin films using different experimental techniques. WO3 has been prepared by hot-filament metal oxide deposition (HFMOD). The films, chemical stoichiometry was determined by X-ray photoelectron spectroscopy (XPS). The m...

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Bibliographic Details
Main Authors:	Joel Díaz-Reyes, Roberto Castillo-Ojeda, Miguel Galván-Arellano, Orlando Zaca-Moran
Format:	Article
Language:	English
Published:	Wiley 2013-01-01
Series:	Advances in Condensed Matter Physics
Online Access:	http://dx.doi.org/10.1155/2013/591787
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