Characterization of WO3 Thin Films Grown on Silicon by HFMOD
We studied the effect of annealing temperature on the physical properties of WO3 thin films using different experimental techniques. WO3 has been prepared by hot-filament metal oxide deposition (HFMOD). The films, chemical stoichiometry was determined by X-ray photoelectron spectroscopy (XPS). The m...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2013-01-01
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| Series: | Advances in Condensed Matter Physics |
| Online Access: | http://dx.doi.org/10.1155/2013/591787 |
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