DESIGN PRINCIPLES AND BLOCK SCHEMES OF THE PROBE AUTOMATIC INSPECTION SYSTEMS FOR MICROAND NANOELECTRONICS ON A WAFER
In this work we suggested the principles of design and block schemes of probe systems for analytical and interoperation measurement and inspection of high-speed microand nano on a chip systems in the nanosecond range. The sources of wideband signals distortion and errors of probe inspection systems...
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| Format: | Article |
| Language: | English |
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Belarusian National Technical University
2015-04-01
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| Series: | Приборы и методы измерений |
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| Online Access: | https://pimi.bntu.by/jour/article/view/100 |
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| author | V. A. Minchenko G. F. Kovalchuk S. B. Shkolyk |
| author_facet | V. A. Minchenko G. F. Kovalchuk S. B. Shkolyk |
| author_sort | V. A. Minchenko |
| collection | DOAJ |
| description | In this work we suggested the principles of design and block schemes of probe systems for analytical and interoperation measurement and inspection of high-speed microand nano on a chip systems in the nanosecond range. The sources of wideband signals distortion and errors of probe inspection systems for large integrated circuits inspection as well as transient response of high speed contacting probes are considered with the OTDR device with picosecond resolution. The features and defined errors of precision positioners for linear stepper motors and magnetic air motors for precise positioning of the probes on the pads with automatic sensing of LSI wafer are discussed. |
| format | Article |
| id | doaj-art-5665b7b5191e4c17819b7cfe5ca1afe4 |
| institution | Kabale University |
| issn | 2220-9506 2414-0473 |
| language | English |
| publishDate | 2015-04-01 |
| publisher | Belarusian National Technical University |
| record_format | Article |
| series | Приборы и методы измерений |
| spelling | doaj-art-5665b7b5191e4c17819b7cfe5ca1afe42025-02-03T11:37:42ZengBelarusian National Technical UniversityПриборы и методы измерений2220-95062414-04732015-04-0102677594DESIGN PRINCIPLES AND BLOCK SCHEMES OF THE PROBE AUTOMATIC INSPECTION SYSTEMS FOR MICROAND NANOELECTRONICS ON A WAFERV. A. Minchenko0G. F. Kovalchuk1S. B. Shkolyk2ГНПО «ПЛАНАР», г. МинскГНПО «ПЛАНАР», г. МинскГНПО «ПЛАНАР», г. МинскIn this work we suggested the principles of design and block schemes of probe systems for analytical and interoperation measurement and inspection of high-speed microand nano on a chip systems in the nanosecond range. The sources of wideband signals distortion and errors of probe inspection systems for large integrated circuits inspection as well as transient response of high speed contacting probes are considered with the OTDR device with picosecond resolution. The features and defined errors of precision positioners for linear stepper motors and magnetic air motors for precise positioning of the probes on the pads with automatic sensing of LSI wafer are discussed.https://pimi.bntu.by/jour/article/view/100probe testingsemiconductor wafer |
| spellingShingle | V. A. Minchenko G. F. Kovalchuk S. B. Shkolyk DESIGN PRINCIPLES AND BLOCK SCHEMES OF THE PROBE AUTOMATIC INSPECTION SYSTEMS FOR MICROAND NANOELECTRONICS ON A WAFER Приборы и методы измерений probe testing semiconductor wafer |
| title | DESIGN PRINCIPLES AND BLOCK SCHEMES OF THE PROBE AUTOMATIC INSPECTION SYSTEMS FOR MICROAND NANOELECTRONICS ON A WAFER |
| title_full | DESIGN PRINCIPLES AND BLOCK SCHEMES OF THE PROBE AUTOMATIC INSPECTION SYSTEMS FOR MICROAND NANOELECTRONICS ON A WAFER |
| title_fullStr | DESIGN PRINCIPLES AND BLOCK SCHEMES OF THE PROBE AUTOMATIC INSPECTION SYSTEMS FOR MICROAND NANOELECTRONICS ON A WAFER |
| title_full_unstemmed | DESIGN PRINCIPLES AND BLOCK SCHEMES OF THE PROBE AUTOMATIC INSPECTION SYSTEMS FOR MICROAND NANOELECTRONICS ON A WAFER |
| title_short | DESIGN PRINCIPLES AND BLOCK SCHEMES OF THE PROBE AUTOMATIC INSPECTION SYSTEMS FOR MICROAND NANOELECTRONICS ON A WAFER |
| title_sort | design principles and block schemes of the probe automatic inspection systems for microand nanoelectronics on a wafer |
| topic | probe testing semiconductor wafer |
| url | https://pimi.bntu.by/jour/article/view/100 |
| work_keys_str_mv | AT vaminchenko designprinciplesandblockschemesoftheprobeautomaticinspectionsystemsformicroandnanoelectronicsonawafer AT gfkovalchuk designprinciplesandblockschemesoftheprobeautomaticinspectionsystemsformicroandnanoelectronicsonawafer AT sbshkolyk designprinciplesandblockschemesoftheprobeautomaticinspectionsystemsformicroandnanoelectronicsonawafer |