Influence of A.C. Frequency on Hollow Magnetron Sputtering Discharge Parameters
In the present work, optical emission spectroscopy was used to diagnose the influence of A.C. power source frequency on the hollow magnetron sputtering discharge parameters (such as discharge emission, discharge current and voltage, glow discharge structure, temperature (Te) and electron number den...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
University of Baghdad
2024-03-01
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| Series: | Iraqi Journal of Physics |
| Subjects: | |
| Online Access: | https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/1191 |
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