Scanning Mirror Benchmarking Platform Based on Two-Dimensional Position Sensitive Detector and Its Accuracy Analysis
A MEMS scanning mirror is a beam scanning device based on MEMS technology, which plays an important role in the fields of Lidar, medical imaging, laser projection display, and so on. The accurate measurement of the scanning mirror index can verify its performance and application scenarios. This pape...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-03-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/3/348 |
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