Experimental Analysis of Fuzzy Gain-Scheduled PID Controller With a Feedforward Compensator for an Ultra-Precise Piezoactuated Micropositioning Stage
The piezoactuated micropositioning stage discussed in this study employs an all-ceramic insulation and a flexure-guide mechanism. It demonstrates remarkable capabilities, including achieving subnanometer resolution, high positioning accuracy, rapid response, and a high load capacity. The successful...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10870216/ |
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