Gas-sensitive properties of por-SiO2 /SnOx multilayer structures

Gas-sensitive properties of por-SiO2 /SnOx multilayer structures

Multilayer structures based on macroporous silicon and tin oxide with platinum are obtained. By scanning electron microscopy (SEM), it is found that tin oxide uniformly covers the surface of macroporous silicon. The EDA data shows the existence of platinum in the nanocomposite. Investigation of...

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Bibliographic Details
Main Authors: E. A. Roslikova, V. E. Roslikov, K. E. Ivlev
Format: Article
Language:English
Published: Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education 2018-07-01
Series:Омский научный вестник
Subjects:
porous silicon
multilayer structures
tin oxide
gas sensitive properties
Online Access:https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/3%20(159)/107-109%20%D0%A0%D0%BE%D1%81%D0%BB%D0%B8%D0%BA%D0%BE%D0%B2%D0%B0%20%D0%95.%20%D0%90.,%20%D0%A0%D0%BE%D1%81%D0%BB%D0%B8%D0%BA%D0%BE%D0%B2%20%D0%92.%20%D0%95.,%20%D0%98%D0%B2%D0%BB%D0%B5%D0%B2%20%D0%9A.%20%D0%95..pdf
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