Gas-sensitive properties of por-SiO2 /SnOx multilayer structures

Multilayer structures based on macroporous silicon and tin oxide with platinum are obtained. By scanning electron microscopy (SEM), it is found that tin oxide uniformly covers the surface of macroporous silicon. The EDA data shows the existence of platinum in the nanocomposite. Investigation of...

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Main Authors: E. A. Roslikova, V. E. Roslikov, K. E. Ivlev
Format: Article
Language:English
Published: Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education 2018-07-01
Series:Омский научный вестник
Subjects:
Online Access:https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/3%20(159)/107-109%20%D0%A0%D0%BE%D1%81%D0%BB%D0%B8%D0%BA%D0%BE%D0%B2%D0%B0%20%D0%95.%20%D0%90.,%20%D0%A0%D0%BE%D1%81%D0%BB%D0%B8%D0%BA%D0%BE%D0%B2%20%D0%92.%20%D0%95.,%20%D0%98%D0%B2%D0%BB%D0%B5%D0%B2%20%D0%9A.%20%D0%95..pdf
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author E. A. Roslikova
V. E. Roslikov
K. E. Ivlev
author_facet E. A. Roslikova
V. E. Roslikov
K. E. Ivlev
author_sort E. A. Roslikova
collection DOAJ
description Multilayer structures based on macroporous silicon and tin oxide with platinum are obtained. By scanning electron microscopy (SEM), it is found that tin oxide uniformly covers the surface of macroporous silicon. The EDA data shows the existence of platinum in the nanocomposite. Investigation of gas sensitive properties shows that the obtained test structures with platinum have a higher sensitivity to CO and CH4 gas molecules at a temperature of 150 °C than structures with tin oxide without platinum.
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publishDate 2018-07-01
publisher Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
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spelling doaj-art-4ceb02bf80e049b399cdc377600c07bc2025-02-02T03:57:00ZengOmsk State Technical University, Federal State Autonoumos Educational Institution of Higher EducationОмский научный вестник1813-82252541-75412018-07-013 (159)10710910.25206/1813-8225-2018-159-107-109Gas-sensitive properties of por-SiO2 /SnOx multilayer structuresE. A. Roslikova0V. E. Roslikov1K. E. Ivlev2Omsk Scientific Center of the Siberian Branch of the Russian Academy of SciencesOmsk Scientific Center of the Siberian Branch of the Russian Academy of SciencesOmsk Scientific Center of the Siberian Branch of the Russian Academy of SciencesMultilayer structures based on macroporous silicon and tin oxide with platinum are obtained. By scanning electron microscopy (SEM), it is found that tin oxide uniformly covers the surface of macroporous silicon. The EDA data shows the existence of platinum in the nanocomposite. Investigation of gas sensitive properties shows that the obtained test structures with platinum have a higher sensitivity to CO and CH4 gas molecules at a temperature of 150 °C than structures with tin oxide without platinum.https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/3%20(159)/107-109%20%D0%A0%D0%BE%D1%81%D0%BB%D0%B8%D0%BA%D0%BE%D0%B2%D0%B0%20%D0%95.%20%D0%90.,%20%D0%A0%D0%BE%D1%81%D0%BB%D0%B8%D0%BA%D0%BE%D0%B2%20%D0%92.%20%D0%95.,%20%D0%98%D0%B2%D0%BB%D0%B5%D0%B2%20%D0%9A.%20%D0%95..pdfporous siliconmultilayer structurestin oxidegas sensitive properties
spellingShingle E. A. Roslikova
V. E. Roslikov
K. E. Ivlev
Gas-sensitive properties of por-SiO2 /SnOx multilayer structures
Омский научный вестник
porous silicon
multilayer structures
tin oxide
gas sensitive properties
title Gas-sensitive properties of por-SiO2 /SnOx multilayer structures
title_full Gas-sensitive properties of por-SiO2 /SnOx multilayer structures
title_fullStr Gas-sensitive properties of por-SiO2 /SnOx multilayer structures
title_full_unstemmed Gas-sensitive properties of por-SiO2 /SnOx multilayer structures
title_short Gas-sensitive properties of por-SiO2 /SnOx multilayer structures
title_sort gas sensitive properties of por sio2 snox multilayer structures
topic porous silicon
multilayer structures
tin oxide
gas sensitive properties
url https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/3%20(159)/107-109%20%D0%A0%D0%BE%D1%81%D0%BB%D0%B8%D0%BA%D0%BE%D0%B2%D0%B0%20%D0%95.%20%D0%90.,%20%D0%A0%D0%BE%D1%81%D0%BB%D0%B8%D0%BA%D0%BE%D0%B2%20%D0%92.%20%D0%95.,%20%D0%98%D0%B2%D0%BB%D0%B5%D0%B2%20%D0%9A.%20%D0%95..pdf
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