Gas-sensitive properties of por-SiO2 /SnOx multilayer structures
Multilayer structures based on macroporous silicon and tin oxide with platinum are obtained. By scanning electron microscopy (SEM), it is found that tin oxide uniformly covers the surface of macroporous silicon. The EDA data shows the existence of platinum in the nanocomposite. Investigation of...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
2018-07-01
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| Series: | Омский научный вестник |
| Subjects: | |
| Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/3%20(159)/107-109%20%D0%A0%D0%BE%D1%81%D0%BB%D0%B8%D0%BA%D0%BE%D0%B2%D0%B0%20%D0%95.%20%D0%90.,%20%D0%A0%D0%BE%D1%81%D0%BB%D0%B8%D0%BA%D0%BE%D0%B2%20%D0%92.%20%D0%95.,%20%D0%98%D0%B2%D0%BB%D0%B5%D0%B2%20%D0%9A.%20%D0%95..pdf |
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| Summary: | Multilayer structures based on macroporous silicon and tin oxide
with platinum are obtained. By scanning electron microscopy
(SEM), it is found that tin oxide uniformly covers the surface
of macroporous silicon. The EDA data shows the existence of
platinum in the nanocomposite. Investigation of gas sensitive
properties shows that the obtained test structures with platinum
have a higher sensitivity to CO and CH4
gas molecules at a
temperature of 150 °C than structures with tin oxide without
platinum. |
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| ISSN: | 1813-8225 2541-7541 |