Development of a spatial accuracy compensation method based on multi-beam laser interferometer
Abstract A mathematical model has been established for the error associated with the degree of freedom for each motion axis, with a correction applied based on the 12-line method in three-dimensional space. A multi-beam laser interferometer is proposed, which comprises four lasers, where different l...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-05-01
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| Series: | Scientific Reports |
| Subjects: | |
| Online Access: | https://doi.org/10.1038/s41598-025-01540-y |
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