Development of a spatial accuracy compensation method based on multi-beam laser interferometer

Abstract A mathematical model has been established for the error associated with the degree of freedom for each motion axis, with a correction applied based on the 12-line method in three-dimensional space. A multi-beam laser interferometer is proposed, which comprises four lasers, where different l...

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Main Authors: Lihua Lei, Changjian Sun, Zhangning Xie, Lijie Liang, Yunxia Fu, Bo Zhang
Format: Article
Language:English
Published: Nature Portfolio 2025-05-01
Series:Scientific Reports
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Online Access:https://doi.org/10.1038/s41598-025-01540-y
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author Lihua Lei
Changjian Sun
Zhangning Xie
Lijie Liang
Yunxia Fu
Bo Zhang
author_facet Lihua Lei
Changjian Sun
Zhangning Xie
Lijie Liang
Yunxia Fu
Bo Zhang
author_sort Lihua Lei
collection DOAJ
description Abstract A mathematical model has been established for the error associated with the degree of freedom for each motion axis, with a correction applied based on the 12-line method in three-dimensional space. A multi-beam laser interferometer is proposed, which comprises four lasers, where different laser combinations can be used to measure different parameters, ultimately achieving simultaneous measurement of errors for the six degrees of freedom. This has informed the development of a spatial error measurement and accuracy compensation system. The error in the X/Y/Z axis data of the computer numerical control (CNC) machine tool is determined using the multi-beam laser interferometer. Spatial accuracy compensation is achieved by applying a software algorithm, and the positioning accuracy is obtained by measuring the same axis at different spatial coordinate positions to verify correction of the angular error. The experimental results have confirmed that after spatial error compensation, linear positioning accuracy, horizontal and vertical straightness errors were improved by nearly 96%, 89% and 55% respectively; the average and maximum deviations of positioning accuracy were improved by nearly 88% and 91% respectively.
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publishDate 2025-05-01
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spelling doaj-art-4cb6d5d51a5a4fb085b9f6c61db409d22025-08-20T02:32:08ZengNature PortfolioScientific Reports2045-23222025-05-0115111210.1038/s41598-025-01540-yDevelopment of a spatial accuracy compensation method based on multi-beam laser interferometerLihua Lei0Changjian Sun1Zhangning Xie2Lijie Liang3Yunxia Fu4Bo Zhang5Shanghai Institute of Measurement and Testing TechnologyRenishaw (Shanghai) Trading Co LtdShanghai Institute of Measurement and Testing TechnologyShanghai Institute of Measurement and Testing TechnologyShanghai Institute of Measurement and Testing TechnologyShanghai Institute of Measurement and Testing TechnologyAbstract A mathematical model has been established for the error associated with the degree of freedom for each motion axis, with a correction applied based on the 12-line method in three-dimensional space. A multi-beam laser interferometer is proposed, which comprises four lasers, where different laser combinations can be used to measure different parameters, ultimately achieving simultaneous measurement of errors for the six degrees of freedom. This has informed the development of a spatial error measurement and accuracy compensation system. The error in the X/Y/Z axis data of the computer numerical control (CNC) machine tool is determined using the multi-beam laser interferometer. Spatial accuracy compensation is achieved by applying a software algorithm, and the positioning accuracy is obtained by measuring the same axis at different spatial coordinate positions to verify correction of the angular error. The experimental results have confirmed that after spatial error compensation, linear positioning accuracy, horizontal and vertical straightness errors were improved by nearly 96%, 89% and 55% respectively; the average and maximum deviations of positioning accuracy were improved by nearly 88% and 91% respectively.https://doi.org/10.1038/s41598-025-01540-yLaser interferometerAccuracySpatial positioningError compensation
spellingShingle Lihua Lei
Changjian Sun
Zhangning Xie
Lijie Liang
Yunxia Fu
Bo Zhang
Development of a spatial accuracy compensation method based on multi-beam laser interferometer
Scientific Reports
Laser interferometer
Accuracy
Spatial positioning
Error compensation
title Development of a spatial accuracy compensation method based on multi-beam laser interferometer
title_full Development of a spatial accuracy compensation method based on multi-beam laser interferometer
title_fullStr Development of a spatial accuracy compensation method based on multi-beam laser interferometer
title_full_unstemmed Development of a spatial accuracy compensation method based on multi-beam laser interferometer
title_short Development of a spatial accuracy compensation method based on multi-beam laser interferometer
title_sort development of a spatial accuracy compensation method based on multi beam laser interferometer
topic Laser interferometer
Accuracy
Spatial positioning
Error compensation
url https://doi.org/10.1038/s41598-025-01540-y
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AT lijieliang developmentofaspatialaccuracycompensationmethodbasedonmultibeamlaserinterferometer
AT yunxiafu developmentofaspatialaccuracycompensationmethodbasedonmultibeamlaserinterferometer
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