Flexible micromachined ultrasound transducers (MUTs) for biomedical applications
Abstract The use of bulk piezoelectric transducer arrays in medical imaging is a well-established technology that operates based on thickness mode piezoelectric vibration. Meanwhile, advancements in fabrication techniques have led to the emergence of micromachined alternatives, namely, piezoelectric...
Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-01-01
|
| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-024-00783-5 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1832594616966184960 |
|---|---|
| author | Sanjog Vilas Joshi Sina Sadeghpour Nadezda Kuznetsova Chen Wang Michael Kraft |
| author_facet | Sanjog Vilas Joshi Sina Sadeghpour Nadezda Kuznetsova Chen Wang Michael Kraft |
| author_sort | Sanjog Vilas Joshi |
| collection | DOAJ |
| description | Abstract The use of bulk piezoelectric transducer arrays in medical imaging is a well-established technology that operates based on thickness mode piezoelectric vibration. Meanwhile, advancements in fabrication techniques have led to the emergence of micromachined alternatives, namely, piezoelectric micromachined ultrasound transducer (PMUT) and capacitive micromachined ultrasound transducer (CMUT). These devices operate in flexural mode using piezoelectric thin films and electrostatic forces, respectively. In addition, the development of flexible ultrasound transducers based on these principles has opened up new possibilities for biomedical applications, including biomedical imaging, sensing, and stimulation. This review provides a detailed discussion of the need for flexible micromachined ultrasound transducers (MUTs) and potential applications, their specifications, materials, fabrication, and electronics integration. Specifically, the review covers fabrication approaches and compares the performance specifications of flexible PMUTs and CMUTs, including resonance frequency, sensitivity, flexibility, and other relevant factors. Finally, the review concludes with an outlook on the challenges and opportunities associated with the realization of efficient MUTs with high performance and flexibility. |
| format | Article |
| id | doaj-art-4c0a6a218451472bb4ceb0107782a17f |
| institution | Kabale University |
| issn | 2055-7434 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | Nature Publishing Group |
| record_format | Article |
| series | Microsystems & Nanoengineering |
| spelling | doaj-art-4c0a6a218451472bb4ceb0107782a17f2025-01-19T12:27:06ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342025-01-0111112110.1038/s41378-024-00783-5Flexible micromachined ultrasound transducers (MUTs) for biomedical applicationsSanjog Vilas Joshi0Sina Sadeghpour1Nadezda Kuznetsova2Chen Wang3Michael Kraft4Department of Electrical Engineering (ESAT-MNS)Department of Electrical Engineering (ESAT-MNS)Department of Electrical Engineering (ESAT-MNS)Department of Electrical Engineering (ESAT-MNS)Department of Electrical Engineering (ESAT-MNS)Abstract The use of bulk piezoelectric transducer arrays in medical imaging is a well-established technology that operates based on thickness mode piezoelectric vibration. Meanwhile, advancements in fabrication techniques have led to the emergence of micromachined alternatives, namely, piezoelectric micromachined ultrasound transducer (PMUT) and capacitive micromachined ultrasound transducer (CMUT). These devices operate in flexural mode using piezoelectric thin films and electrostatic forces, respectively. In addition, the development of flexible ultrasound transducers based on these principles has opened up new possibilities for biomedical applications, including biomedical imaging, sensing, and stimulation. This review provides a detailed discussion of the need for flexible micromachined ultrasound transducers (MUTs) and potential applications, their specifications, materials, fabrication, and electronics integration. Specifically, the review covers fabrication approaches and compares the performance specifications of flexible PMUTs and CMUTs, including resonance frequency, sensitivity, flexibility, and other relevant factors. Finally, the review concludes with an outlook on the challenges and opportunities associated with the realization of efficient MUTs with high performance and flexibility.https://doi.org/10.1038/s41378-024-00783-5 |
| spellingShingle | Sanjog Vilas Joshi Sina Sadeghpour Nadezda Kuznetsova Chen Wang Michael Kraft Flexible micromachined ultrasound transducers (MUTs) for biomedical applications Microsystems & Nanoengineering |
| title | Flexible micromachined ultrasound transducers (MUTs) for biomedical applications |
| title_full | Flexible micromachined ultrasound transducers (MUTs) for biomedical applications |
| title_fullStr | Flexible micromachined ultrasound transducers (MUTs) for biomedical applications |
| title_full_unstemmed | Flexible micromachined ultrasound transducers (MUTs) for biomedical applications |
| title_short | Flexible micromachined ultrasound transducers (MUTs) for biomedical applications |
| title_sort | flexible micromachined ultrasound transducers muts for biomedical applications |
| url | https://doi.org/10.1038/s41378-024-00783-5 |
| work_keys_str_mv | AT sanjogvilasjoshi flexiblemicromachinedultrasoundtransducersmutsforbiomedicalapplications AT sinasadeghpour flexiblemicromachinedultrasoundtransducersmutsforbiomedicalapplications AT nadezdakuznetsova flexiblemicromachinedultrasoundtransducersmutsforbiomedicalapplications AT chenwang flexiblemicromachinedultrasoundtransducersmutsforbiomedicalapplications AT michaelkraft flexiblemicromachinedultrasoundtransducersmutsforbiomedicalapplications |