A New Environmentally Friendly Chemical Mechanical Polishing Method Applied for Surface Finishing Ti-6Al-4V Alloy
A new eco-friendly slurry has been developed for the chemical mechanical polishing process with a solution of malic acid, deionized water, and an oxidizing agent hydrogen peroxide (H2O2). The surface quality of Ti-6Al-4V workpieces with the proposed chemical mechanical polishing slurry with optimal...
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Publishing House of Wrocław Board of Scientific Technical Societies Federation NOT
2023-07-01
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| Series: | Journal of Machine Engineering |
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| author | Nguyen Minh Quang Nguyen Ngoc Quan Nguyen Trong Mai Le Thi Phuong Thanh Nguyen Tien Tung Tran Ngoc Tan Ha Thanh Hai Nguyen Duy Trinh |
| author_facet | Nguyen Minh Quang Nguyen Ngoc Quan Nguyen Trong Mai Le Thi Phuong Thanh Nguyen Tien Tung Tran Ngoc Tan Ha Thanh Hai Nguyen Duy Trinh |
| author_sort | Nguyen Minh Quang |
| collection | DOAJ |
| description | A new eco-friendly slurry has been developed for the chemical mechanical polishing process with a solution of malic acid, deionized water, and an oxidizing agent hydrogen peroxide (H2O2). The surface quality of Ti-6Al-4V workpieces with the proposed chemical mechanical polishing slurry with optimal parameters include oxidizers (H2O2), colloidal (SiO2) slurry, and deionized water by weight 8%, 45%, and 47% respectively, the pH concentration is adjusted 4 through the malic acid content present in the slurry. Experimental results obtained with the proposed chemical mechanical polishing method show a more improved surface quality than previous studies when applying for polishing Ti-6Al-4V alloy. The developed chemical mechanical polishing method's polishing results under optimal conditions obtain an ultra-fine surface quality with Ra = 0.696 nm over a measuring area of 53×70 μm2. X-ray photoelectron (XPS) and electrochemical measurements were used to study the chemical reaction mechanisms in the proposed chemical mechanical polishing process. The chemical mechanical polishing processes for the surface of the Ti-6Al-4V alloy workpiece with the H2O2 oxidizing agent showed high suitability with the reactants formed on the surface such as Ti, V, and Al oxide. The established chemical mechanical polishing method shows high applicability in environmental protection and Ti-6Al-4V alloy ultra-precision machining industries. |
| format | Article |
| id | doaj-art-4bdcfea3b4dd4e059f64b9fbc9b58fcf |
| institution | DOAJ |
| issn | 1895-7595 2391-8071 |
| language | English |
| publishDate | 2023-07-01 |
| publisher | Publishing House of Wrocław Board of Scientific Technical Societies Federation NOT |
| record_format | Article |
| series | Journal of Machine Engineering |
| spelling | doaj-art-4bdcfea3b4dd4e059f64b9fbc9b58fcf2025-08-20T02:56:27ZengPublishing House of Wrocław Board of Scientific Technical Societies Federation NOTJournal of Machine Engineering1895-75952391-80712023-07-01234647610.36897/jme/169614169614A New Environmentally Friendly Chemical Mechanical Polishing Method Applied for Surface Finishing Ti-6Al-4V AlloyNguyen Minh Quang0Nguyen Ngoc Quan1Nguyen Trong Mai2Le Thi Phuong Thanh3Nguyen Tien Tung4Tran Ngoc Tan5Ha Thanh Hai6Nguyen Duy Trinh7Mechanical, Hanoi University of Industry, Viet NamMechanical, Hanoi University of Industry, Viet NamMechanical, Hanoi University of Industry, Viet NamMechanical, Hanoi University of Industry, Viet NamMechanical, Hanoi University of Industry, Viet NamMechanical, Hanoi University of Industry, Viet NamMechanical, Hanoi University of Industry, Viet NamMechanical, Hanoi University of Industry, Viet NamA new eco-friendly slurry has been developed for the chemical mechanical polishing process with a solution of malic acid, deionized water, and an oxidizing agent hydrogen peroxide (H2O2). The surface quality of Ti-6Al-4V workpieces with the proposed chemical mechanical polishing slurry with optimal parameters include oxidizers (H2O2), colloidal (SiO2) slurry, and deionized water by weight 8%, 45%, and 47% respectively, the pH concentration is adjusted 4 through the malic acid content present in the slurry. Experimental results obtained with the proposed chemical mechanical polishing method show a more improved surface quality than previous studies when applying for polishing Ti-6Al-4V alloy. The developed chemical mechanical polishing method's polishing results under optimal conditions obtain an ultra-fine surface quality with Ra = 0.696 nm over a measuring area of 53×70 μm2. X-ray photoelectron (XPS) and electrochemical measurements were used to study the chemical reaction mechanisms in the proposed chemical mechanical polishing process. The chemical mechanical polishing processes for the surface of the Ti-6Al-4V alloy workpiece with the H2O2 oxidizing agent showed high suitability with the reactants formed on the surface such as Ti, V, and Al oxide. The established chemical mechanical polishing method shows high applicability in environmental protection and Ti-6Al-4V alloy ultra-precision machining industries.http://jmacheng.not.pl/A-New-Environmentally-Friendly-Chemical-Mechanical-Polishing-Method-Applied-for-Surface,169614,0,2.htmlti-6al-4vsilicahydrogen peroxidechemical mechanical polishing |
| spellingShingle | Nguyen Minh Quang Nguyen Ngoc Quan Nguyen Trong Mai Le Thi Phuong Thanh Nguyen Tien Tung Tran Ngoc Tan Ha Thanh Hai Nguyen Duy Trinh A New Environmentally Friendly Chemical Mechanical Polishing Method Applied for Surface Finishing Ti-6Al-4V Alloy Journal of Machine Engineering ti-6al-4v silica hydrogen peroxide chemical mechanical polishing |
| title | A New Environmentally Friendly Chemical Mechanical Polishing Method Applied for Surface Finishing Ti-6Al-4V Alloy |
| title_full | A New Environmentally Friendly Chemical Mechanical Polishing Method Applied for Surface Finishing Ti-6Al-4V Alloy |
| title_fullStr | A New Environmentally Friendly Chemical Mechanical Polishing Method Applied for Surface Finishing Ti-6Al-4V Alloy |
| title_full_unstemmed | A New Environmentally Friendly Chemical Mechanical Polishing Method Applied for Surface Finishing Ti-6Al-4V Alloy |
| title_short | A New Environmentally Friendly Chemical Mechanical Polishing Method Applied for Surface Finishing Ti-6Al-4V Alloy |
| title_sort | new environmentally friendly chemical mechanical polishing method applied for surface finishing ti 6al 4v alloy |
| topic | ti-6al-4v silica hydrogen peroxide chemical mechanical polishing |
| url | http://jmacheng.not.pl/A-New-Environmentally-Friendly-Chemical-Mechanical-Polishing-Method-Applied-for-Surface,169614,0,2.html |
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