Periodically poled aluminum scandium nitride bulk acoustic wave resonators and filters for communications in the 6G era

Periodically poled aluminum scandium nitride bulk acoustic wave resonators and filters for communications in the 6G era

Abstract Bulk Acoustic Wave (BAW) filters find applications in radio frequency (RF) communication systems for Wi-Fi, 3G, 4G, and 5G networks. In the beyond-5G (potential 6G) era, high-frequency bands (>8 GHz) are expected to require resonators with high-quality factor (Q) and electromechanical co...

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Bibliographic Details
Main Authors: Izhar, M. M. A. Fiagbenu, S. Yao, X. Du, P. Musavigharavi, Y. Deng, J. Leathersich, C. Moe, A. Kochhar, E. A. Stach, R. Vetury, R. H. Olsson
Format: Article
Language:English
Published: Nature Publishing Group 2025-01-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-024-00857-4
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