Vacuum vaporizer for fabrication of thin films of material by sublimations
The offered vacuum vaporizer can be used under the vacuum fabrication of films from Cr, Mg, Mn, SiO, GeO, MoO3 , WO3, ZnS, ZnSe, CdS, CdSe, CdTe by sublimations. Vacuum vaporizer containing tubular element with tightly closed by flat end areas, executed from Та (or Мо) foil by the thickness (0,...
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| Format: | Article |
| Language: | English |
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Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
2019-12-01
|
| Series: | Омский научный вестник |
| Subjects: | |
| Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2019/6%20(168)/80-82%20%D0%91%D0%BB%D0%B5%D1%81%D0%BC%D0%B0%D0%BD%20%D0%90.%20%D0%98.,%20%D0%91%D1%83%D1%80%D0%BB%D0%B0%D0%BA%D0%BE%D0%B2%20%D0%A0.%20%D0%91..pdf |
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| _version_ | 1832573615308013568 |
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| author | A. I. Blesman R. B. Burlakov |
| author_facet | A. I. Blesman R. B. Burlakov |
| author_sort | A. I. Blesman |
| collection | DOAJ |
| description | The offered vacuum vaporizer can be used under the vacuum
fabrication of films from Cr, Mg, Mn, SiO, GeO, MoO3
, WO3,
ZnS, ZnSe, CdS, CdSe, CdTe by sublimations. Vacuum vaporizer
containing tubular element with tightly closed by flat end areas,
executed from Та (or Мо) foil by the thickness (0,05–0,1) mm
with the high temperature of melting and evaporations and is
kept a central region of the radial cross-section with the hole in
the manner of the oval situated between flat end areas having
variable area of the current section, which decreases toward from
the centre of the tubular element to its ends. The offered vaporizer has broader field-performance and technological possibilities,
since for the fabrication of the vaporizer use a metallic foil that
allows under its fabrication to change amounts of the vaporizer.
Herewith the vaporizer possible to use for fabrication of films
repeatedly executing its recurrent boot without removing from
the vacuum camera. |
| format | Article |
| id | doaj-art-48bbb43de6224c3a9f0bb4c9d71d9d62 |
| institution | Kabale University |
| issn | 1813-8225 2541-7541 |
| language | English |
| publishDate | 2019-12-01 |
| publisher | Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education |
| record_format | Article |
| series | Омский научный вестник |
| spelling | doaj-art-48bbb43de6224c3a9f0bb4c9d71d9d622025-02-02T03:32:57ZengOmsk State Technical University, Federal State Autonoumos Educational Institution of Higher EducationОмский научный вестник1813-82252541-75412019-12-016 (168)808210.25206/1813-8225-2019-168-80-82Vacuum vaporizer for fabrication of thin films of material by sublimationsA. I. Blesman0https://orcid.org/0000-0003-2837-3469R. B. Burlakov1Omsk State Technical UniversityDostoevsky Omsk State UniversityThe offered vacuum vaporizer can be used under the vacuum fabrication of films from Cr, Mg, Mn, SiO, GeO, MoO3 , WO3, ZnS, ZnSe, CdS, CdSe, CdTe by sublimations. Vacuum vaporizer containing tubular element with tightly closed by flat end areas, executed from Та (or Мо) foil by the thickness (0,05–0,1) mm with the high temperature of melting and evaporations and is kept a central region of the radial cross-section with the hole in the manner of the oval situated between flat end areas having variable area of the current section, which decreases toward from the centre of the tubular element to its ends. The offered vaporizer has broader field-performance and technological possibilities, since for the fabrication of the vaporizer use a metallic foil that allows under its fabrication to change amounts of the vaporizer. Herewith the vaporizer possible to use for fabrication of films repeatedly executing its recurrent boot without removing from the vacuum camera. https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2019/6%20(168)/80-82%20%D0%91%D0%BB%D0%B5%D1%81%D0%BC%D0%B0%D0%BD%20%D0%90.%20%D0%98.,%20%D0%91%D1%83%D1%80%D0%BB%D0%B0%D0%BA%D0%BE%D0%B2%20%D0%A0.%20%D0%91..pdfvacuum vaporizerfabrication of thin filmsmethod sublimation |
| spellingShingle | A. I. Blesman R. B. Burlakov Vacuum vaporizer for fabrication of thin films of material by sublimations Омский научный вестник vacuum vaporizer fabrication of thin films method sublimation |
| title | Vacuum vaporizer for fabrication of thin films of material by sublimations |
| title_full | Vacuum vaporizer for fabrication of thin films of material by sublimations |
| title_fullStr | Vacuum vaporizer for fabrication of thin films of material by sublimations |
| title_full_unstemmed | Vacuum vaporizer for fabrication of thin films of material by sublimations |
| title_short | Vacuum vaporizer for fabrication of thin films of material by sublimations |
| title_sort | vacuum vaporizer for fabrication of thin films of material by sublimations |
| topic | vacuum vaporizer fabrication of thin films method sublimation |
| url | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2019/6%20(168)/80-82%20%D0%91%D0%BB%D0%B5%D1%81%D0%BC%D0%B0%D0%BD%20%D0%90.%20%D0%98.,%20%D0%91%D1%83%D1%80%D0%BB%D0%B0%D0%BA%D0%BE%D0%B2%20%D0%A0.%20%D0%91..pdf |
| work_keys_str_mv | AT aiblesman vacuumvaporizerforfabricationofthinfilmsofmaterialbysublimations AT rbburlakov vacuumvaporizerforfabricationofthinfilmsofmaterialbysublimations |