CRYSTAL PROPERTIES OF SILICON OBTAINED BY THERMOMIGRATION

The article presents research results of the crystal structure of the silicon regions, locally recrystallized in the process of thermomigration liquid silicon-aluminum areas of a silicon substrate. Selective etching of silicon is found that recrystallized in the channel, there are areas that have in...

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Bibliographic Details
Main Authors: Vladimir Lozovskij, Leonid Lunin, Boris Seredin, Oleg Devitsky
Format: Article
Language:Russian
Published: North Caucasus Federal University 2022-05-01
Series:Вестник Северо-Кавказского федерального университета
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Online Access:https://vestnikskfu.elpub.ru/jour/article/view/1034
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