High-Resolution Compact On-Chip Spectrometer Based on an Echelle Grating With Densely Packed Waveguide Array

We design a 121-channel on-chip spectrometer based on an echelle grating with densely packed waveguide array on 220-nm silicon-on-insulator platform. It offers a high spectral resolution of 0.5 nm in a 3 <sup>&#x002A;</sup> 3 mm<sup>2</sup> footprint, covering a spectral...

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Main Authors: Keqi Ma, Kaixuan Chen, Ning Zhu, Liu Liu, Sailing He
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Photonics Journal
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Online Access:https://ieeexplore.ieee.org/document/8581502/
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author Keqi Ma
Kaixuan Chen
Ning Zhu
Liu Liu
Sailing He
author_facet Keqi Ma
Kaixuan Chen
Ning Zhu
Liu Liu
Sailing He
author_sort Keqi Ma
collection DOAJ
description We design a 121-channel on-chip spectrometer based on an echelle grating with densely packed waveguide array on 220-nm silicon-on-insulator platform. It offers a high spectral resolution of 0.5 nm in a 3 <sup>&#x002A;</sup> 3 mm<sup>2</sup> footprint, covering a spectral range of 60 nm near the central wavelength of 1550 nm. We fabricate the spectrometer with 20 channels for verification of the design, which is limited by our equipment. The measured crosstalk for the fabricated device is &#x2013;4.3&#x00A0;dB and can be improved by better fabrication techniques. This spectrometer can be used for lab-on-a-chip spectroscopy applications, such as drug analysis in biotechnological and pharmaceutical research.
format Article
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institution Kabale University
issn 1943-0655
language English
publishDate 2019-01-01
publisher IEEE
record_format Article
series IEEE Photonics Journal
spelling doaj-art-4374bf347311411aae8c04966e7e2b562025-08-20T03:33:21ZengIEEEIEEE Photonics Journal1943-06552019-01-011111710.1109/JPHOT.2018.28885928581502High-Resolution Compact On-Chip Spectrometer Based on an Echelle Grating With Densely Packed Waveguide ArrayKeqi Ma0https://orcid.org/0000-0002-3048-4996Kaixuan Chen1Ning Zhu2Liu Liu3https://orcid.org/0000-0002-3651-544XSailing He4Center for Optical and Electromagnetic Research, National Engineering Research Center for Optical Instruments, Zhejiang University, Hangzhou, ChinaCenter for Optical and Electromagnetic Research, National Engineering Research Center for Optical Instruments, Zhejiang University, Hangzhou, ChinaInstitute of Optoelectronic Materials & Technologies, South China Normal University, Guangzhou, ChinaZJU-SCNU Joint Research Center of Photonics, Centre for Optical and Electromagnetic Research, South China Academy of Advanced Optoelectronics, South China Normal University, Guangzhou, ChinaCenter for Optical and Electromagnetic Research, National Engineering Research Center for Optical Instruments, Zhejiang University, Hangzhou, ChinaWe design a 121-channel on-chip spectrometer based on an echelle grating with densely packed waveguide array on 220-nm silicon-on-insulator platform. It offers a high spectral resolution of 0.5 nm in a 3 <sup>&#x002A;</sup> 3 mm<sup>2</sup> footprint, covering a spectral range of 60 nm near the central wavelength of 1550 nm. We fabricate the spectrometer with 20 channels for verification of the design, which is limited by our equipment. The measured crosstalk for the fabricated device is &#x2013;4.3&#x00A0;dB and can be improved by better fabrication techniques. This spectrometer can be used for lab-on-a-chip spectroscopy applications, such as drug analysis in biotechnological and pharmaceutical research.https://ieeexplore.ieee.org/document/8581502/Echelle gratingon-chip spectrometerdensely packed waveguide array
spellingShingle Keqi Ma
Kaixuan Chen
Ning Zhu
Liu Liu
Sailing He
High-Resolution Compact On-Chip Spectrometer Based on an Echelle Grating With Densely Packed Waveguide Array
IEEE Photonics Journal
Echelle grating
on-chip spectrometer
densely packed waveguide array
title High-Resolution Compact On-Chip Spectrometer Based on an Echelle Grating With Densely Packed Waveguide Array
title_full High-Resolution Compact On-Chip Spectrometer Based on an Echelle Grating With Densely Packed Waveguide Array
title_fullStr High-Resolution Compact On-Chip Spectrometer Based on an Echelle Grating With Densely Packed Waveguide Array
title_full_unstemmed High-Resolution Compact On-Chip Spectrometer Based on an Echelle Grating With Densely Packed Waveguide Array
title_short High-Resolution Compact On-Chip Spectrometer Based on an Echelle Grating With Densely Packed Waveguide Array
title_sort high resolution compact on chip spectrometer based on an echelle grating with densely packed waveguide array
topic Echelle grating
on-chip spectrometer
densely packed waveguide array
url https://ieeexplore.ieee.org/document/8581502/
work_keys_str_mv AT keqima highresolutioncompactonchipspectrometerbasedonanechellegratingwithdenselypackedwaveguidearray
AT kaixuanchen highresolutioncompactonchipspectrometerbasedonanechellegratingwithdenselypackedwaveguidearray
AT ningzhu highresolutioncompactonchipspectrometerbasedonanechellegratingwithdenselypackedwaveguidearray
AT liuliu highresolutioncompactonchipspectrometerbasedonanechellegratingwithdenselypackedwaveguidearray
AT sailinghe highresolutioncompactonchipspectrometerbasedonanechellegratingwithdenselypackedwaveguidearray