Theoretical and experimental investigations of the CMOS compatible Pirani gauges with a temperature compensation model

Theoretical and experimental investigations of the CMOS compatible Pirani gauges with a temperature compensation model

Abstract In this article, a CMOS-compatible Pirani vacuum gauge was proposed featuring enhanced sensitivity, lower detection limit, and high-temperature stability, achieved through the implementation of a surface micromachining method coupled with a temperature compensation strategy. To improve perf...

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Bibliographic Details
Main Authors: Shizhen Xu, Gai Yang, Junfu Chen, Rui Jiao, Ruoqin Wang, Hongyu Yu, Huikai Xie, Xiaoyi Wang
Format: Article
Language:English
Published: Nature Publishing Group 2025-01-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-024-00832-z
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