Microstructured Liquid Metal‐Based Embedded‐Type Sensor Array for Curved Pressure Mapping

Abstract Human hands can envelop the surface of an object and recognize its shape through touch. However, existing stretchable haptic sensors exhibit limited flexibility and stability to detect pressure during deformation, while also solely achieving recognition of planar objects. Inspired by the st...

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Main Authors: Haoyu Li, Chengjun Zhang, Hongyu Xu, Qing Yang, Zexiang Luo, Cheng Li, Lin Kai, Yizhao Meng, Jialiang Zhang, Jie Liang, Feng Chen
Format: Article
Language:English
Published: Wiley 2025-01-01
Series:Advanced Science
Subjects:
Online Access:https://doi.org/10.1002/advs.202413233
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author Haoyu Li
Chengjun Zhang
Hongyu Xu
Qing Yang
Zexiang Luo
Cheng Li
Lin Kai
Yizhao Meng
Jialiang Zhang
Jie Liang
Feng Chen
author_facet Haoyu Li
Chengjun Zhang
Hongyu Xu
Qing Yang
Zexiang Luo
Cheng Li
Lin Kai
Yizhao Meng
Jialiang Zhang
Jie Liang
Feng Chen
author_sort Haoyu Li
collection DOAJ
description Abstract Human hands can envelop the surface of an object and recognize its shape through touch. However, existing stretchable haptic sensors exhibit limited flexibility and stability to detect pressure during deformation, while also solely achieving recognition of planar objects. Inspired by the structure of skin tissue, an embedded construction‐enabled liquid metal‐based e‐skin composed of a liquid metal microstructured electrode (LM‐ME) array is fabricated for curved pressure mapping. The embedded LM‐ME‐based sensor elements are fabricated by using femtosecond laser‐induced micro/nanostructures and water/hydrogel assisted patterning method, which enables high sensitivity (7.42 kPa−1 in the range of 0–0.1 kPa) and high stability through an interlinked support isolation structure for the sensor units. The sensor array with a high interfacial toughness of 1328 J m−2 can maintain pressure sensation under bending and stretching conditions. Additionally, the embedded construction and laser‐induced bumps effectively reduce crosstalk from 58 to 7.8% compared to conventional flexible sensors with shared surfaces. The stretchable and mechanically stable sensor arrays possess shape‐adaptability that enables pressure mapping on non‐flat surfaces, which has great potential for object recognition in robotic skins and human‐computer interaction.
format Article
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institution Kabale University
issn 2198-3844
language English
publishDate 2025-01-01
publisher Wiley
record_format Article
series Advanced Science
spelling doaj-art-3d03979890a143568e915c6b721e507f2025-01-20T13:04:18ZengWileyAdvanced Science2198-38442025-01-01123n/an/a10.1002/advs.202413233Microstructured Liquid Metal‐Based Embedded‐Type Sensor Array for Curved Pressure MappingHaoyu Li0Chengjun Zhang1Hongyu Xu2Qing Yang3Zexiang Luo4Cheng Li5Lin Kai6Yizhao Meng7Jialiang Zhang8Jie Liang9Feng Chen10State Key Laboratory for Manufacturing System Engineering and Shaanxi Key Laboratory of Photonics Technology for Information School of Electronic Science and Engineering Xi'an Jiaotong University Xi'an 710049 P. R. ChinaSchool of Instrument Science and Technology Xi'an Jiaotong University Xi'an 710049 P. R. ChinaState Key Laboratory for Manufacturing System Engineering and Shaanxi Key Laboratory of Photonics Technology for Information School of Electronic Science and Engineering Xi'an Jiaotong University Xi'an 710049 P. R. ChinaSchool of Instrument Science and Technology Xi'an Jiaotong University Xi'an 710049 P. R. ChinaState Key Laboratory for Manufacturing System Engineering and Shaanxi Key Laboratory of Photonics Technology for Information School of Electronic Science and Engineering Xi'an Jiaotong University Xi'an 710049 P. R. ChinaState Key Laboratory for Manufacturing System Engineering and Shaanxi Key Laboratory of Photonics Technology for Information School of Electronic Science and Engineering Xi'an Jiaotong University Xi'an 710049 P. R. ChinaState Key Laboratory for Manufacturing System Engineering and Shaanxi Key Laboratory of Photonics Technology for Information School of Electronic Science and Engineering Xi'an Jiaotong University Xi'an 710049 P. R. ChinaState Key Laboratory for Manufacturing System Engineering and Shaanxi Key Laboratory of Photonics Technology for Information School of Electronic Science and Engineering Xi'an Jiaotong University Xi'an 710049 P. R. ChinaState Key Laboratory for Manufacturing System Engineering and Shaanxi Key Laboratory of Photonics Technology for Information School of Electronic Science and Engineering Xi'an Jiaotong University Xi'an 710049 P. R. ChinaState Key Laboratory for Manufacturing System Engineering and Shaanxi Key Laboratory of Photonics Technology for Information School of Electronic Science and Engineering Xi'an Jiaotong University Xi'an 710049 P. R. ChinaState Key Laboratory for Manufacturing System Engineering and Shaanxi Key Laboratory of Photonics Technology for Information School of Electronic Science and Engineering Xi'an Jiaotong University Xi'an 710049 P. R. ChinaAbstract Human hands can envelop the surface of an object and recognize its shape through touch. However, existing stretchable haptic sensors exhibit limited flexibility and stability to detect pressure during deformation, while also solely achieving recognition of planar objects. Inspired by the structure of skin tissue, an embedded construction‐enabled liquid metal‐based e‐skin composed of a liquid metal microstructured electrode (LM‐ME) array is fabricated for curved pressure mapping. The embedded LM‐ME‐based sensor elements are fabricated by using femtosecond laser‐induced micro/nanostructures and water/hydrogel assisted patterning method, which enables high sensitivity (7.42 kPa−1 in the range of 0–0.1 kPa) and high stability through an interlinked support isolation structure for the sensor units. The sensor array with a high interfacial toughness of 1328 J m−2 can maintain pressure sensation under bending and stretching conditions. Additionally, the embedded construction and laser‐induced bumps effectively reduce crosstalk from 58 to 7.8% compared to conventional flexible sensors with shared surfaces. The stretchable and mechanically stable sensor arrays possess shape‐adaptability that enables pressure mapping on non‐flat surfaces, which has great potential for object recognition in robotic skins and human‐computer interaction.https://doi.org/10.1002/advs.202413233bio‐inspired structurefemtosecond laserliquid metalobjects recognitionpressure sensor array
spellingShingle Haoyu Li
Chengjun Zhang
Hongyu Xu
Qing Yang
Zexiang Luo
Cheng Li
Lin Kai
Yizhao Meng
Jialiang Zhang
Jie Liang
Feng Chen
Microstructured Liquid Metal‐Based Embedded‐Type Sensor Array for Curved Pressure Mapping
Advanced Science
bio‐inspired structure
femtosecond laser
liquid metal
objects recognition
pressure sensor array
title Microstructured Liquid Metal‐Based Embedded‐Type Sensor Array for Curved Pressure Mapping
title_full Microstructured Liquid Metal‐Based Embedded‐Type Sensor Array for Curved Pressure Mapping
title_fullStr Microstructured Liquid Metal‐Based Embedded‐Type Sensor Array for Curved Pressure Mapping
title_full_unstemmed Microstructured Liquid Metal‐Based Embedded‐Type Sensor Array for Curved Pressure Mapping
title_short Microstructured Liquid Metal‐Based Embedded‐Type Sensor Array for Curved Pressure Mapping
title_sort microstructured liquid metal based embedded type sensor array for curved pressure mapping
topic bio‐inspired structure
femtosecond laser
liquid metal
objects recognition
pressure sensor array
url https://doi.org/10.1002/advs.202413233
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