High-Precision and Low-Complexity Silicon Waveguide-Integrated Temperature Sensor System
This paper proposes a high-sensitivity-integrated temperature sensor with low complexity based on a silicon waveguide. The waveguide layout is optimized through the finite-difference time-domain (FDTD) simulations, and a compressed taper structure improves the efficiency of speckle data collection w...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-06-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/25/13/3922 |
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| Summary: | This paper proposes a high-sensitivity-integrated temperature sensor with low complexity based on a silicon waveguide. The waveguide layout is optimized through the finite-difference time-domain (FDTD) simulations, and a compressed taper structure improves the efficiency of speckle data collection while reducing the system complexity and cost. To achieve precise temperature demodulation, this paper employed a convolutional neural network (CNN) for nonlinear fitting. Experimental results demonstrate the sensor’s ability to perform temperature measurement in the range of −20 °C to 100 °C, with a best resolution of 0.00287 °C (2.87 mK). The resolution and reliability of the measurements are validated by comparison with the theoretical values. This study introduces a novel approach to silicon waveguide-based temperature sensing. |
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| ISSN: | 1424-8220 |