Enhancing parameters of silicon varactors using laser gettering

The authors investigate how and why defects influence the inverse characteristics of varactors. The paper presents experimental results on the effect laser gettering has on the electrical parameters of varactors. The mechanisms of the laser gettering effect on the parameters of varactors are analyze...

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Main Authors: I. M. Vikulin, V. N. Litvinenko, S. V. Shutov, A. I. Maronchuk, A. N. Demenskiy, V. I. Glukhova
Format: Article
Language:English
Published: Politehperiodika 2018-04-01
Series:Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
Subjects:
Online Access:https://tkea.com.ua/index.php/journal/article/view/163
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author I. M. Vikulin
V. N. Litvinenko
S. V. Shutov
A. I. Maronchuk
A. N. Demenskiy
V. I. Glukhova
author_facet I. M. Vikulin
V. N. Litvinenko
S. V. Shutov
A. I. Maronchuk
A. N. Demenskiy
V. I. Glukhova
author_sort I. M. Vikulin
collection DOAJ
description The authors investigate how and why defects influence the inverse characteristics of varactors. The paper presents experimental results on the effect laser gettering has on the electrical parameters of varactors. The mechanisms of the laser gettering effect on the parameters of varactors are analyzed.
format Article
id doaj-art-3ab6ea7805df4e828c19e2d905e6045b
institution OA Journals
issn 2225-5818
2309-9992
language English
publishDate 2018-04-01
publisher Politehperiodika
record_format Article
series Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
spelling doaj-art-3ab6ea7805df4e828c19e2d905e6045b2025-08-20T02:19:57ZengPolitehperiodikaTekhnologiya i Konstruirovanie v Elektronnoi Apparature2225-58182309-99922018-04-012293210.15222/TKEA2018.2.29163Enhancing parameters of silicon varactors using laser getteringI. M. Vikulin0V. N. Litvinenko1S. V. Shutov2A. I. Maronchuk3A. N. Demenskiy4V. I. Glukhova5Odessa National Academy of Telecommunications named after A. S. Popov, Odesа, UkraineKherson National Technical University, Kherson, UkraineV. Ye. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, Kyiv, UkraineV. Ye. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, Kyiv, UkraineV. Ye. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, Kyiv, UkraineKherson National Technical University, Kherson, UkraineThe authors investigate how and why defects influence the inverse characteristics of varactors. The paper presents experimental results on the effect laser gettering has on the electrical parameters of varactors. The mechanisms of the laser gettering effect on the parameters of varactors are analyzed.https://tkea.com.ua/index.php/journal/article/view/163varactorsiliconimpuritiesgetteringreverse current
spellingShingle I. M. Vikulin
V. N. Litvinenko
S. V. Shutov
A. I. Maronchuk
A. N. Demenskiy
V. I. Glukhova
Enhancing parameters of silicon varactors using laser gettering
Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
varactor
silicon
impurities
gettering
reverse current
title Enhancing parameters of silicon varactors using laser gettering
title_full Enhancing parameters of silicon varactors using laser gettering
title_fullStr Enhancing parameters of silicon varactors using laser gettering
title_full_unstemmed Enhancing parameters of silicon varactors using laser gettering
title_short Enhancing parameters of silicon varactors using laser gettering
title_sort enhancing parameters of silicon varactors using laser gettering
topic varactor
silicon
impurities
gettering
reverse current
url https://tkea.com.ua/index.php/journal/article/view/163
work_keys_str_mv AT imvikulin enhancingparametersofsiliconvaractorsusinglasergettering
AT vnlitvinenko enhancingparametersofsiliconvaractorsusinglasergettering
AT svshutov enhancingparametersofsiliconvaractorsusinglasergettering
AT aimaronchuk enhancingparametersofsiliconvaractorsusinglasergettering
AT andemenskiy enhancingparametersofsiliconvaractorsusinglasergettering
AT viglukhova enhancingparametersofsiliconvaractorsusinglasergettering