A high-performance 10 mm diameter MEMS fast steering mirror with integrated piezoresistive angle sensors for laser inter-satellite links
Abstract This paper presents a compact and high-performance piezoelectric micro-electro-mechanical system (MEMS) fast steering mirror (FSM) designed for use in laser inter-satellite links (ISLs). The FSM features a large optical aperture of 10 mm and is batch fabricated using an 8-inch wafer-level e...
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| Main Authors: | , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-04-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00935-1 |
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