Transparent Al-Doped ZnO Thin Films for High-Sensitivity NO<sub>2</sub> Gas Sensing

Transparent Al-Doped ZnO Thin Films for High-Sensitivity NO<sub>2</sub> Gas Sensing

This study developed a transparent NO<sub>2</sub> gas sensor with enhanced sensing performance and high optical transmittance. Al-doped ZnO thin films were deposited by atomic layer deposition, which was chosen for its capability to precisely control surface chemistry at the atomic scale...

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Bibliographic Details
Main Authors: So-Young Bak, Se-Hyeong Lee, Hyeongrok Jang, Minseong Kim, Sungjae Kim, Moonsuk Yi
Format: Article
Language:English
Published: MDPI AG 2025-06-01
Series:Sensors
Subjects:
Al-doped ZnO
oxygen vacancies
gas sensor
NO<sub>2</sub>
Trimethylaluminum
Online Access:https://www.mdpi.com/1424-8220/25/12/3622
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