High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry
According to the principle of phase-shifting interferometry and spiral phase characteristics of the vortex beam, this article proposes a method for detecting the surface profile of a transparent object, in which the +1 order vortex beam is generated by a spatial light modulator and is taken as the r...
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
2021-01-01
|
| Series: | International Journal of Optics |
| Online Access: | http://dx.doi.org/10.1155/2021/6937072 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|